Description Model: Matrix Bobcat 209S Microwave Plasma Asher semiconductor process equipment Category: Plasma Asher Plasma Descum Original Equipment Manufacturer: Matrix Integrated Systems, Inc Condition: Refurbished by seller SN: 10222 Vintage:2001 Wafer Size: 8 inch configuration. Valid Time: Subject to prior sale Lead Time: 12 weeks Location: Silicon Valley, CA, U.S.A. Warranty: 12 months non-consumable parts. Installation and training: Available at extra charge Service Contract: Available at extra charge Matrix Bobcat 209S Asher plasma Asher Plasma descum semiconductor equipment General Description Power: 208VAC, 3 Phase, 50/60HZ Installed in Wafer Fab until January 26th 2017 Fully Operational Manuals (CD) Available with Tool Asher Component Details Mainframe Type Standalone Model Matrix Bobcat 209S asher Chambers How Many? 1 Type RIE Process (e.g., Ash, Clean, Light Etch) ASH Load Locks/Load Plate Open Cassette or SMIF Open Cassette How Many? 1 Robots How Many? 1 Method of Transport: Transfer Unit Make/Models: Rorze, RR701 RF Generators How Many? 2 Make/Models: Comdel FR-111R2, Microwave generator 3kw Gas Box Gases used per chamber: 3 Identify gases: N2-1000, N2 -300, N2- 1000 ( gases run O2,N2, none) MFC’s used (Make/Model): MKS Control System PC or Control Rack? PC Software Type and Version: Windows NT Please contact us for more information on the product: Your Name*: Your Email: Your Message: Captchac Code Submit: [dynamichidden dynamichidden-813 "CF7_URL"] Δ All the Matrix Bobcat 209S Plasma Asher Plasma Descum semiconductor process equipment trademarks belongs to Matrix Integrated Systems, Inc, the original equipment manufacturer. All rights reserved. Share the post "Matrix 209S 8″ Asher" FacebookXShare…
