Varian Spare Parts
$16.2
$20.09
Description Spare Parts for Varian 3180, 3190 and 3290 series sputtering systems Please contact us for the availability of any of them. They are subject to prior sale without notice. Appreciate your time. Agilent Valve, Vacuum, L/L · 27-199811-00 Valve, NW-40 · 00-678254-01 Alkon Valve, Solenoid, 120VAC · 27-179814-00 Valve, Solenoid, Elevator · 27-179816-00 Solenoid, 24VDC · 27-179819-00 Augot Switch, Reed Magnetic · 00-672552-00 Balzers Felt, Oil Reserve · PM033759-T Bimba Cylinder, Stroke · 092-DP Cylinders, Bimba · 27-999657-00 Cylinder, Air, Shutter · 27-999651-00 Cylinder, Air · 27-300053-00 Bodine Motor, Quantum · 04-722924-01 Bolt Screw, Set · 728-S0172-910 Bourns Potentiometer · 3540S-1-502 Bussman Fuse, 10A 250V · 67-130510-00 Bussmann Fuse, 10A 240V, Eurotherm · 55-500005-00 C. A. Norgren Regulator/Filter Assy. · 27-189122-00 Regulator, 50 PSI · 27-189162-00 Regulator, Water · 27-189139-00 Comair Fan · SU2A5 Crydom Relays · ODC-5 CTI On-Board Water Pump · 8120818G001 Kit, Water Pump 1050 Cyropanel · 8080021K001 Kit, Water Pump 1050 Cyropanel · 8080021K002 Kit, Water Pump 350 Cyropanel · 8080021K003 Valve, CTI Poppet · 8080250K045 Filter Valve · 80250K031 Kit, Rebuild 15K Array · 8080002K010 Deltrol Valve, Metering · EF-20B Dow Corning Spray Lubricant · G-n Eagle Counter, Digital · 66F114 Ebara Absorber, Ebara · 31302000 Cryo Pump Assy. · FS-8 Array, Charcoal 2nd Stage · 323-0101 Pump, Cryo FS-8 · 03-230055-00 Cryo Pump Hose · 3130020E Array, 1st Stage · 07-601429-00 Eurotherm Thryster, Eurotherm, Analog · 831 Controller, Eurotherm, Analog · 00-672160-00 Power Pack, Eurotherm, Analog · 00-674424-00 Controller, Eurotherm, Digital · 818S Fabco-Air Valve, Pancake · 27-999671-00 Valve, Shut Off 1/4 · 27-109601-00 Capacitor · 41-299824-00 Capacitor · 41-299834-00 Cylinder .75 Clevis · 27-999848-00 Spcr,Insl.Ring R F Etch · 00-684273-00 Screw, 1/4 20×2 · 953-5001 Screw, 12p 25-28 · 12-352064-22 Lamo Lamp · 67-423000-00 Flange Igniter Blankoff · 00-681062-00 Ferrofludic Clamp, Ferrofludic · 113516 Fluke Controller, Fluke 1722A · 00-689807-01 Fluke Meter · 8408A GE Circuit Breaker, 70A 480V · TED134070 Circuit Breaker, 480V · 55-700165-00 Geco Granville-Phillips TC, Vac Gauge · 270006 Controller, Vacuum TC · 275-094 Gauge Tube, Convectron · 27-229979-00 Hewlett-Packard Power Supply · X4010034 Humphrey Valve, Solenoid 24VDC · 27-179918-00 Valve, Soleniod 120V · 27-179916-00 Valve, Solenoid 120V · 27-179917-00 Valve, Solenoid, 24VDC · MC41E1-24VDC Valve, Solenoid · 27-179919-00 Valve, 4 way 24Vdc · 62-4E1-36-70 Solenoid, 24 VDC · 04-709551-01 ICS Leybold-Hereaus Trap, RST-40V · 99-171-137 Valve, Secvac 115vac · 283-11B1 Littlefuse Fuse, 12A 250V · L25S-12 Matheson Regulator, Pressure, L/L Valve · SP2339-1 Regulator Assy. · 00-685924-00 McDowell Seal Kit, 2.0-2.5 Bore · 20635 Kit, Rebuild, Hi Vac · 09-830025-00 O-Ring · 27-409334-00 O-Ring · 27-403016-00 O-Ring · 27-409092-00 O-Ring, Heater · 27-402602-00 O-Ring Kit, 3290 · MCD 8214 Quad Ring · Q4222 Quad Ring · Q4228 Kit, Rebuild Alkon LL Ram · 20738 Kit, Rebuild Rod Seal · 20734 O-Ring · 27-402620-00 MKS Cable Simulator Kit · PTS-10, CB254-2 Valve, Flow Control · 00-683761-01 Transducer, Pressure · 127AA-00001E Controller, MKS 250 · 250-1-D Cable, Pressure Control · CB-258-1-10 Nor-Cal Valves, Vacuum · ESVP-1502-NWB Norgren Cylinder, L/L Ram 3180 · 04-714953-01 Numatics Valve, Solenoid · 27-180194-00 Nupro Bellows Valve · SS-BN4405 Bellows Valve · SS-BNV4682 Omron Counter · H7ET OEM Sensor, Drive Motor · 04-716650-01 Sensor, Prox. Switch · 00-678149-01 Heater Element 5″ · 00-672255-00 Sensor, Wafer · 00-674685-00 Sensor, Drive Motor Assy. · 00-674704-00 Ribbon Cable · 00-674948-00 Switch, Actuator · 71-999885-00 Switch, Micro · 71-249829-00 Fuse Kit · 62-010004-00 Motor, Wafer Handler · 00-684049-00 Cable · CB2151/248 Rotation Sensor · 04-707856-03 Switch, Reed Assy. · 00-678618-01 Heater Element, 4″ · 00-672256-00 Cable, Ion Gauge, 845 · 27-299955-00 O-Ring · 27-409334-00 Seal, Rubber · 00-953009-30 Door O-Ring, 3290 · 00-683302-00 Quad Ring · 27-459663-00 Gasket, Viewport · 00-643545-02 Cooling Pole Assy. · 00-672905-00 Screw, Nylon · 12-900906-00 Screw, Modified · 04-712210-02 Anti-Rotation strap · 00-672257-00 Sensor Cap · 00-674682-00 Thrust Washer · 00-672448-00 Clip Ring SST, 5″ · 00-678087-02 Spring, Retainer 5″ Htr · 04-712265-01 Spring, Retainer 4″ Htr. · 04-715838-01 Sprocket, Idler · 00-674101-00 Extension Shaft · 04-707854-01 Screw, 8-32×1/2 Soc Hd · 12-312008-08 Washer # 10 · 14-102010-00 Screw, 10-32×5/16 Soc Hd · 12-312060-05 Screw, 10-32×3/8 Soc Hd Vtd. · 12-600024-00 Screw, 10-32×5/16 Hex Hd, Trimmed · 12-752060-05 Screw, Vtd 6-32×1/4 Soc Hd · 12-600023-00 Screw, Vtd 4-40×1/8 Soc Hd · 00-600067-00 Screw, Set 4-40×1/4 · 11-652004-04 Screw, 6-32×3/8 Vntd Pan · 12-600022-00 Screw, Hex Hd 10x32x1/4 · 12-752060-04 Sprocket Assy. · 00-681153-00 Screw, Vntd 10-32×5/16 Soc Hd · 12-600025-00 Screw, Vntd 10-32×5/16 Hex Hd · 12-600025-02 Screw, 10-32×7/16 Soc Hd · 12-600034-00 Screw, Vntd 4-40×3/16 Soc Hd · 12-600088-00 Screw, 4-40×3/16 Soc Hd · 12-600067-00 Screw, 6-32×1/4 Soc Hd · 21-752006-04 Screw, 10-32×5/16 Soc Hd · 12-312060-05 Screw, 10-32×1/2 Flt Hd Phil · 12-112060-08 Screw, 10-32×1/2 Soc Hd · 12-752060-08 Screw, 8-32×3/16 Hex Hd. Trimmed · 12-752008-03 Screw, 10-32×3/8 Soc Hd · 12-751060-06 Screw, 1/4-20×5/8 Soc Hd · 12-312014-10 Screw, 4-40×1/8 Soc Hd · 12-312004-02 1/4×20 Screw, Shoulder · 12-999862-00 Screw, Vntd 4-40×1/2 Pan Hd Slot · 4-40 x 1/2 Screw, Vntd 4-40×1/8 Soc Hd · 4-40 x 1/8 Screw, 1/4-20×1 Soc Hd · 1/4-20 x 1 Screw, 10-32×1/2 Hex Hd · 10-32 x 1/2 Screw, Vntd 6-32×1/4 Soc Hd · 6-32 x 1/4 Screw, Vntd 8-32×1/4 Soc Hd · 8-32 x 1/4 Screw, 8-32×1/4 Flt Hd Phil · 8-32 x 1/4 Screw, 8-32×1/2 Soc Hd · 8-32 x 1/2 Screw, 10-32×1/4 Hex Hd · 10-32 x 1/4 Screw, 1/4-20×3/6 Soc Hd · 1/4-20 x 3/6 Screw, Vntd 10-32×3/8 Hex Hd · 10-32 x 3/8 Screw, 6-32×1/4 Pan Hd Phil · 6-32 x 1/4 Set, Screw/Nut 1/4-20 x 3/4 · 953-5044 Washer, Turner · 00-684046-00 Bearing, Needle · 21-128808-00 Wire, Filament Tungsten · 00-680992-00 Spring, Retainer 6″ Htr · 04-712167-01 Screw, Flat Head, 1/2×20 · 12-333968-56 Cooling Band Assy., Conmag · 00-664257-01 Inserts, Transfer Plate · 00-664443-00 Magnet, Mini-Quantum Assy. · 04-716498-01 Insulator, Table, 5″ · 00-674826-00 Tube, Heat Exchanger Inlet · 00-664268-01 Clip Ring SST, 6″ · 00-678087-04 Insert, Central Pole Piece · 00-682229-00 Hub, Modular · 04-709833-01 Shaft, Rotor · 04-707628-01 Bearing, Seal Assy., Qtm · 04-709847-01 Collar · 04-707848-01 Screw, 4-40×5/8 Vtd · 12-600062-00 Anti-Rotation Strap, 3290 · 00-683166-00 Screw, Vntd, SCH, 8-32X875 · 12-600056-00 Screw, Vnt, 8-32×1/4 FHP · 12-600020-00 Screw, Shoulder · 12-999541-00 Bearing, B-67 · B-67 Anode, Conmag · 00-664178-00 Transfer Plate Diamond Pin · 00-664274-00 Ram Pad · 04-712188-02 Screw, Socket Hd., 3/8-16×1 · 12-312016-20 Set Screw, 6-32×1/4 · 11-622006-04 Ball Bearing · 21-109605-00 Ram Pad · 04-712186-02 Spring Plunger · 22-999967-00 Insulator, 4″ Etch Ring · 00-684270-00 Roll Pin · 19-224954-00 Chain, Transfer Plate 3290 · 00-685508-04 Roll Pin · 19-224762-00 Roll Pin · 19-224968-00 Wafer Lifter Stop · 00-680524-00 Brass Bushing · 14-999775-00 Roll Pin · 19-224978-00 Ring Retainer · 22-678967-00 Roll Pin · 19-224774-00 Roller, Flat Aligner · 00-678772-03 Bearing, Thrust · 00-680917-00 Wafer Stop Blade, 5″ · 00-678302-02 Pressure Plate, Assy. · 00-684169-00 Wafer Pick Up · 00-678317-01 Heater Assy., 5″ SST · 00-685996-00 Pressure Plate Assy. · 00-683162-00 Transfer Plate Assy. · 00-683141-01 Insulator, Anode · 00-664167-00 Insulator, Cathode · 00-664166-00 Belt, Timing · 20-480079-00 Gas Feed Transition Tube · 00-677955-01 Cassette, Wafer 4″ · 00-664394-00 Table, Insert. 5″ · 00-674830-00 Screen, Cryo Pump · 00-674850-00 Bellows, LL Ram · 00-678274-01 Wafer Stop Blade, 6″ · 00-678304-02 Insulator, Mini-Qtm · 04-712078-02 Tube Assy, Flex, Etch · 00-678552-01 Cassette, 6″ Wafer · 00-681359-00 Insert, External Pole Piece · 00-682232-00 Insert, Middle Pole Piece · 00-682237-00 Insulator, 6″ Heater · 00-682548-00 Insulator, Pressure · 00-674827-00 Wafer Stop Blade, 5″ SST · 00-674693-00 Motor, DC · 73-410205-00 Wafer Stop Blade, 4″ · 00-678303-02 Kit B · 00-672744-00 Tube, Ion Gauge · K2500-301 Belt, Timing · 20-480081-00 Heater Element, 6″ · 73-290938-00 Cassette, Wafer 5″ · 00-684088-00 Cooling Band, Outer · 00-682205-00 Cooling Band, Inner · 00-682211-00 Tube Assy, Flex Etch · 00-678552-02 Cylinder, Clip Actuator · 00-664345-00 Bellows, Ram Shaft Assembly · 00-672852-00 Cylinder, Air, 5″ · 00-678319-01 Bellows, Ram Assembly · 00-680909-00 Cylinder, Plastic Door · 00-683772-01 Bellows, Ram · 00-664286-00 Bellows, P/P Ram · 00-684095-00 Valve, BTA · 00-677596-00 Cylinder, Air · 27-999740-00 Pump, Venturi · 00-670615-00 Cylinder, Air · 00-678794-01 Cylinder, L/L Ram 3290 · 04-714954-01 Vacuum Generator · 27-309504-00 PCB, Proteus Water Flow · 04-146378-00 Shield, Lower Isolation · 00-685936-00 Shield, Long · 00-685938-00 Shield, ST2-3L · 00-685957-01 Shield, Secondary · 00-674846-00 Shield, Front Plate, 2 pcs · 00-664337-00 Shield, Rear Plate · 00-664119-00 Shield, RF Etch, inner · 00-671954-00 Shield, Outer Pole Piece · 00-672313-00 Shield, Conmag Combo · 00-673816-00 Anode Cap · 00-674163-00 Shield, ST3-4S · 00-685937-01 Ceramic Clip Ring, 5″ · 00-674782-00 Shield, 5″ Heater, Mini-Qtm · 04-712263-01 Insert, Table RF 4″ · 00-674281-00 Shield, 5″ Heater Bore Mini-Qtm · 04-712264-01 Ceramic Clip Ring, 5″ CV · 00-677814-02 Shield, RF Etch Cover · 00-680703-00 Shield, 4″ P/P Cavity · 00-664219-00 Shield, ST2-3S · 00-685958-00 Shield, Conmag Modified · 00-684278-01 Shield, Conmag Modified · 00-684278-02 Shield, Anode Cover · 00-664198-01 Shield, Ceramic Ring · 00-684145-01 Shield, Heater Bottom · 00-684725-00 Shield, Heater Bottom · 00-684728-00 Ceramic Clip Ring , 6″ · 00-682216-00 Shield, Heater 4″ · 00-684718-00 Shield, Ceramic Ring, 5″ · 00-684145-00 Shield, Conmag · 00-684278-00 Shield, Split Clamp Ring · 00-684281-00 Weldmont, P.P. Shield · 00-684325-00 Shield, Heater, 5″ · 00-684748-00 Kit, Shields, Aluminum · 00-674780-02 Ceramic Clip Ring, 4″ · 00-674505-00 Shield, Heater, 5″ W/Flange · 00-684748-02 Shield, Table, W/O Slit · 00-685951-01 Shield, Pressure Plate · 00-685965-00 Shield, 6″ Heater Bore · 04-712165-01 Shield, Conflat Hole · 04-712083-01 Shield, P/P Ram Tip · 04-712156-01 Collar, P/P Ram Pad · 04-712186-01 Shield, 6″ Heater · 04-712199-01 Shield, Shutter, F/T · 04-712083-03 Shield, NC · 04-714049-02 Shield, Cavity, 6″ · 04-715865-01 Shield, Pressure Plate · 04-715866-01 Ring Assy., Etch 5″ · 00-684694-00 Shield, RF Etch · 00-680701-00 Shield, Heater 6″ · 04-712166-01 Shield, 5″ Ceramic Ring · 00-677842-01 Shield, Outer Support · 00-682938-00 Shield, P/P Weldment 4″ · 00-684257-00 Shield, Heater Bore 5″ · 04-716544-00 Shield, Heater Bore 3290 5″ · 04-716544-01 Shield, Exterior Source 3280 · 00-680902-01 Shield, Pressure Plate, 3280 · 04-716410-02 Shield, 6″ Cavity Shield, 3280 · 00-680574-00 Shield, Screw · 00-681395-00 Shield, Pressure Plate, Qtm · 04-721198-01 Shield, Belly Conmag II · 04-712161-01 Shield, No ViPS · 04-712083-02 Shield, Load Lock · 00-678638-01 Shield, Front Plate, 3290, 2 pc. · 00-683155-00 Valve, Quick Exhaust · 27-200020-00 Valve, Assy. · 00-672217-00 Valve, Needle Argon Station · 00-674766-00 Solenoid, 24VDC · 00-684044-00 Valves, Flow Control · 27-180478-00 Kit, Target · OPT-1491 Persys Cassette, Clip Tool · CV-1.250 PHD Cylinder, 10″ · 27-999748-00 Potter Brumfield Relay · 72-164874-00 Relay, 24VDC · 72-115963-00 Relay, 24VDC · R10-E1-X2-V700 Relay, 6VDC · R10-E1-Y2-SS500 Relay · W93X11-2-15 Power One Power Supply, 15VDC · HD 15-6-A Power Supply · 78-590391-00 Power Supply, 24VDC · CP162-A Power Supply, 5VDC · HB5-3/OVP-A Power Supply, 24V -5V · 78-590383-00 Power Supply, 5V 8A · HN5-9/OVP-A Proteus Proteus Flow Switch · 100 Rotor Assembly · 00-685098-00 Rotor, Proteus · P-100 Water Flow Switch · 71-625042-00 Radar Electric Switch, Toggle · UT2N-1 RBC Bearing, Flanged · 21-139743-00 RF Power Products RF Generator 1KW · RF 10S RF Generator 500 W · RF 5S Semikron Rectifier, High Voltage · 00-674414-00 Diode Bridge · SKK021-16 SCR · 00-431490-00 Signet ORing Kit · 3009 Rebuild Kit, Valve · 33-0119 Skan a Matic Sensor, Amp. Opt. · 08-197050-00 Sensor, Photo Detector · 66-601006-00 Sun Mar Transistor · IRF 131 Turck Proximity Sensor · Bi2UM12AN4XH1141 UC Screw Kit, 3190 · K-3190 Screw, Vented Sch. Cap · 8-32 x 14 Screw, SCH Head · 8-32 x 34 Screw, SCH Head · 8-32 x 38 Screw, Vented Sch. Cap · 8-32 x 58 Screw, Vented Sch. Cap · 8-32 x 78 Shoulder Screw · 12-999546-00 Varian Cable Assy. · 00-685209-00 Cable, Reset, Power Fail · 00-666409-00 Transformer, Power Supply · 44-149146-00 Phase Discramenator Discr. · 00-666315-00 Motor, Drive Assy. · 00-669840-00 Cable, Convection Tube · 00-671720-00 Cable, RF Bias · 00-673089-00 Cable Assy. · 00-674987-00 Cable, Assy Auto Zero · 00-685210-00 Cable, Etch Ring · 00-666435-01 Cable, Assy Coax · 00-672419-02 Cable, Assy · 00-672072-00 Fitting, Blank · 00-674625-00 Port, Sight Flange · 04-673518-00 Cable, Conmag 26 ft. · 00-680781-04 Meter, Panel 3Kw · 00-673395-00 Circuit Breaker, 20A · 55-700397-00 RF Filter Assembly · 00-685100-00 Firing Module · 00-674413-00 Heater Transformer Assy. · 00-685759-01 Cable, 26 Pin · 00-671898-16 Cable Assy. · 00-677664-00 Meter, Panel 15kW · 00-673275-00 Cable Assy. · 00-674358-02 Cable Assy. · 00-674359-02 Cable Assy. · 00-674359-04 Cable Assy. · 00-674358-01 Cable Assy. · 00-674358-05 Cable Assy. · 00-674359-01 Switch, Vacuum 15″ · 00-674929-01 Cable, Dbl End · 00-685454-00 Connector · 53-965903-00 Meter, Panel 3kW · 00-606098-00 Diode · 31-223137-00 Meter, 0-25 · 00-684442-00 Meter 15kv Small Body · 00-684735-00 Transformer · 00-685422-00 Motor, Transfer Plate · 00-685511-00 Kit, Proximity Switch Retro-Fit · 04-716925-01 Relay, Solid State · 00-685529-00 Gauge, Vacuum TC · F0472303 – 0531 Cable, Ceramic Bead · 04-716946-02 Fan, Cooling, Electronics Rack · 20-839934-00 Thermocouple, Heater · 27-180262-00 Switch, Reed · 27-999734-00 Fuse, 2A 500V · 55-500053-00 Fuse, 60A 600V · 55-500300-00 Fuse, 35A 600V · 55-500302-00 Fuse, 100A 700V · 55-500384-00 Sensor, Slow/Stop · 66-601004-00 Sensor, Light Source · 66-601005-00 Fuse, 12A · 67-119057-00 Switch, Micro · 71-429924-00 Switch, Thermostatic · 71-629943-00 Switch, Air Flow · 71-699124-00 Switch, Contact · 71-999738-00 Relay, R-10 · 72-106029-00 Relay, Motor Timing · 73-409318-00 Photo Amplifier · 78-197050-00 Photo Detector Assy. · 00-685295-00 Sensor, Bridge Coil · 00-666164-00 Cable Assy. · 00-674981-00 Meter, 15 KW · 04-718753-03 Meter, Panel 2-KV · 00-684733-00 TC, Vacuum · 27-229907-00 Controller, Motor Transfer Plate · 00-666255-00 Meter, KWH, 3 Station · 04-715634-01 Gauge, TC · 810-2 Controller, Ion Gauge · 845 Controller, Multigage · L8350301 Controller, Ion Gauge · 880 Seal, Bellows · 00-600055-01 O-Ring, Chamber 3180 · 00-674856-00 O-Ring Retaining Tool · 00-687127-01 O-Ring Vac Kit · 00-694788-01 O-Rings · 09-530017-00 O-Ring · 27-402265-00 O-Ring · 27-402382-00 O-Ring · 27-402463-00 O-Ring · 27-402625-00 O-Ring Drive Belt · 27-402746-00 O-Ring, Main Seal · 27-403021-00 O-Ring Bonnet Seal · 27-403029-00 Seal, Rubber · 27-459600-00 Quad Ring · 27-459655-00 O-Ring, Four Lobed · 27-459656-00 O-Ring, Four Lobed · 27-459657-00 Gasket, Indium · 00-659454-00 Screw, Shoulder, 3/8L · 41424 TC Cable · 00-674378-00 Hose Cooling Kit, H2O · 00-672216-00 Sprocket, Weldmont · 00-664011-00 Spacer Guide, 5″ · 00-671123-00 Clamp, Swivel · 22-999809-00 Gage, Block Act. Clip · 00-671294-00 Wafer Clip Block Gage · 00-671295-00 L-Handle Jack · 00-671639-00 Rack Cover Support · 00-680981-00 Wafer Clip · 00-672057-00 Valve Blocking Plate · 27-179859-00 Clamp, Shutter, Weldmont · 00-672401-00 Shutter, Actuator · 00-685405-00 Centering Ring, St. Steel · KC-16-SV Tool, Clip Actuator · 00-673156-00 Cable, Light SKT · 00-685481-00 Spring · 04-715875-01 Screws, Set · 00-673941-00 Bushing · 21-139921-00 Screw, 10-32×1/4 Hex Hd. · 00-673943-00 Shim · 00-671323-00 Rod Mount · 00-674933-00 Spring, Ceramic Ring Retainer · 00-674493-01 Spring, Retainer · 00-674494-01 Screen · 04-710636-01 Filter · 27-590969-00 Shim · 00-680559-00 Gland · 00-674897-00 Gasket, Copper · 09-535070-00 Gasket, 4 1/2″ Copper · 09-535015-00 Pin, Door · 00-664309-00 Spacer, Flat Aligner · 00-671122-00 Spring · 27-790201-00 Clamp, Perforated Shutter · 00-678475-01 conector, clamp · 51-969725-00 Support Insert · 00-678476-01 Gasket, Copper · 27-459860-00 Spindle · 00-664367-00 Detent Bracket, Support · 00-680563-00 Screw, Capture, Mini-Qtm · 04-715871-03 Filament, RF · 00-680734-00 Bead, Ceramic · 24-813008-00 Clamp · 00-680756-00 Clamp · 00-680757-00 Screen, Ion Gauge · 00-656161-00 Magnet, Conmag I · 00-678859-01 Spacer, Coil · 00-682266-00 Bushing, 1/4 x 1/8 · 28-202011-00 Screw · 11-612014-012 Screw, 10-32 x 1/2 Pan Hd Phil · 12-222060-08 Screw, 1/4-20 x 3/4 Soc Hd · 12-312014-12 Shutter Key · 00-684648-00 Screw, 1/4-20 x 1 Soc Hd · 12-312014-20 Screw, 5/16-18 x 1 1/2 Soc Hd · 12-312015-24 Screw, 10-32 x 1/2 Flt Hd Phil · 12-212060-06 Screw, 6-32 x 1/4 Pan Hd Slt · 12-162006-04 Screw, 6-32 x 1/4 Pan Hd Phil · 12-222006-04 Screw, 4-40×1/8 Soc Hd · 00-673940-00 Hex Nut, 10, Slip Washer · 13-312060-00 Washer · 14-112015-00 Ferrule, Comp. 1/4″ · 28-694006-00 Ferrule, Teflon 5/16″ · 28-694578-00 Washer, Plain Shim · 14-900054-00 Washer, #6 · 14-122006-00 Washer, Split · 14-212006-00 Washer, Split · 14-212010-00 Vented Screw · 00-685018-00 Washer, Split · 14-212014-00 Washer, Split · 14-212015-00 Screen · 00-685019-00 Clamp, Conmag Shutter · 00-685403-00 Chain, Drive, Transfer Plate · 00-685508-00 Foreline Trap · 00-685578-00 Bolt, Shoulder · 00-689136-01 Chain, Cassette Drive · 04-710791-01 VCR, “T” Weldmont · 04-712042-01 Spring, P/P Ram Shield · 04-712157-02 Spring, L/L Ram Shield · 04-716733-01 Filament, Hot · 04-717629-01 Gaskets, Copper · 09-535014-00 Gaskets, Copper · 953-5070 Screw, Hex Head, 10-32X3/8 · 12-752060-06 Screw · 12-900511-00 Washer #8 SS · 14-122008-00 Washer, Split · 14-202008-00 Washers, Teflon · 14-999709-00 Cotter Pins · 19-222992-00 Roll Pin · 19-224763-00 Roll Pin · 19-224820-00 Pin, Quick Release, L/L Ram · 19-229899-00 Ball Bearings · 21-109596-00 Ring, Retainer · 22-678311-00 Ring, Retaining · 22-678602-00 Gasket, RF Chamber Gnd · 27-459874-00 Cap, Cajon · 28-200012-00 Fitting, 90 Street, Elbow · 28-205994-00 Fitting, 3/8mpt x 3/4 Flare, Elbow · 28-611018-00 Fitting, 1/4mpt x 1/4 Flare · 28-626907-00 Fitting, 5/16 x 1/4 Elbow · 28-666986-00 Fitting, Elbow 1/4mpt x 1/4fpt · 28-694052-00 Fitting · 28-695039-00 Fitting, Union, 1/4h x 1/4flr · 28-849913-00 Fitting, Union 1/4 x 1/4 · 28-849954-00 Drive Limit, Right Angle · 7055000-01 Clamp · 800-02-40 Bearing · 8FK6301J Bellows, SS 1 1/2 · 953-0119 Screw, Pressure Relief · 12-999835-00 Pin, L/L Ram · 00-664444-00 Sprocket, Weldment · 00-664068-00 Chain, Cassette · 00-674029-00 Chain Assy. · 00-684056-04 Turnbuckle · 00-672232-00 Roller, Flat Aligner, Ceramic · 00-664366-00 Kit, Retrofit Dual · 00-685045-00 Load Lock Manifold · 00-684375-00 Roller, Flat Aligner · 00-678302-01 Insulator · 00-641737-05 Mount, Clip Cylinder · 00-664343-00 Clamp · 00-664080-06 Cover, Blank Off · 00-664231-00 RF Match Box Assy. · 00-671684-01 RF Etch Head · 00-674880-00 Pressure Plate RF Hue Bias · 00-685582-00 Transfer Plate Assy., 5″ · 00-674776-00 Heater Assy., 5″ · 00-684878-00 Bellows · 09-530119-00 Lock Cylinder Assy. W/Key · 00-670594-00 Source, Conmag Assy. · 00-664224-02 Shaft, LL Ram · 00-684096-00 Insulator, Etch Ring · 00-684291-00 Adapter, TC Gauge · 00-672017-00 TC, Vacuum · 00-672017-01 Tube, Inlet, Argon · 00-672117-00 Cassette Rail, Rear · 00-672813-00 T.C, Self Adhecive · SA1-J Mask, CV, 5″ · 00-677813-02 Air Filter Muffler · 00-671946-00 Insert Rail, Rear · 00-674274-00 Insert Rail, Front · 00-674275-00 Table Shield · 00-674330-00 Heater, DC Bias 5″ · 00-685943-01 Roller, Flat Aligner · 00-678761-03 Roller, Flat Aligner · 00-678772-01 Roller, Flat Aligner · 00-678761-01 Floodlight, Large · 67-489007-00 Heater Sieve Trap · F2698301 L/L Ram Seal Plate · 00-664440-01 Tube, Assy. · 00-685918-00 Mask Assy. CV Upgrade · 00-677908-06 Insert, Perforated · 00-678477-01 Screen, AY Millitorr · 00-626269-00 Argon Tube Assembly · 00-678635-01 Wafer Lifter, 6″ · 00-680534-00 Mesh Trap · 00-685579-00 Blank Off, Source · 00-680616-00 Plate, L/L Ram Seal · 00-680074-02 Cassette Rail Insert, Front · 00-680918-00 Cassette Rail, Front · 00-680919-00 Cassette Rail Insert, Rear · 00-680920-00 Screen · 00-681084-00 Heat Distribution Plate · 00-682547-00 Insulation Material, Heater · 00-682550-00 Insulator, RF Ceramic · 00-682884-00 Screen, Hi-Vac Valve · 00-683293-00 Insert, Table, RF Etch · 00-683445-04 Panel · 00-683695-01 Plt Mounting · 04-709285-01 Screen, L/L ISO Valve · 00-684408-00 Screen, L/L · 00-684689-00 Rotational Feedthru · 00-684755-00 Cap, Ignitor · 00-677829-02 Light, Assembly KWR · 00-685388-00 Shield, Ceramic, Heater T.C. · 00-685917-00 Bar Pallet · 00-688156-00 Molecular Sieve Material · 27-320035-00 Bellows, Seal Body · 04-710424-01 Insert Clip Ring · 04-714075-01 Wafer Lifter Arm · 10-98800-01 Bellows, Assembly · 1281-187838-301 Hex Nut, 8, SS · 13-122008-00 Master Link 3/8 · 20-479930-00 Belt, Plastic Drive · 20-480029-00 Key · 22-999783-00 Plunger, Vilier · 22-999842-00 Line, Argon, ViPS · 28-200704-00 Hose Clamp · 28-993144-00 Pump, Turbo, Varian · V-200A Cover, Transducer Back · 71-625047-00 Manual Valve · 951-5091 Oil, TA, Turbo · 969-9901 5″ Flange Extension · 952-5048 Cassette Rail Front · 00-672814-00 Wafer Load Door, 5″ · 00-684170-00 Wafer Lifter, 5″ · 00-674691-00 Heater, 3290 5″ SST · 04-716542-01 Air Cylinder Rebuild Kit · 00-653460-00 Cylinder, Air · 00-672796-00 Cylinder, Air · 04-714147-01 Cylinder, Air · 27-999664-00 Cylinder, Assy., L/L Ram · 00-672859-01 Actuator, Shutter · 00-683405-00 BTA Valve Kit · 09-530090-00 Cylinder, Air · 27-999600-00 Dual Action Cylinder · 27-999650-00 Cylinder, Air, 9″ · 27-999658-00 Air Cylinder · 27-999665-00 Muffler, Pneumatic 1/4 npt · 27-999700-00 PCB, Relay · 00-685712-00 PCB, RF Match · 00-657967-00 PCB, 20 Input Sensor · 00-666082-00 PCB, Audio Output · 00-684572-00 PCB, Power Supply · 00-666361-00 PCB, Output Vac. System · 00-663527-00 PCB, Octal Relay · 00-668552-00 PCB, 10 Input · 00-666055-00 PCB, Input Board · 00-663529-00 PCB, Control, Wide Range · 00-666368-00 PCB, Argon Interface · 00-684041-00 PCB, Reset Control · 00-663535-00 PCB, Argon Pressure · 00-684037-00 PCB, Power Fail · 00-666052-00 PCB, Relay Control · 00-668550-00 PCB, Audio Output · 00-684570-00 PCB, Thin Film Head · 00-684584-00 PCB, GPIB Interface · 00-666079-00 PCB, Isolated Control Interface · 00-674639-00 PCB, Power Supply · 44-149146-00 PCB, Input · 00-666004-00 PCB, Output · 00-666007-00 PCB, Sensor Interface · 00-666085-00 PCB, Cassette Motor Control · 00-666196-00 PCB, Isolator Control · 00-666199-00 PCB, Wafer Status · 00-666208-00 PCB, Wafer Transfer · 00-666211-00 PCB, Servo Control · 00-666273-00 PCB, Relay Driver · 00-666291-00 PCB, Power Control, 12kW · 00-666355-00 PCB, Output Control · 00-671786-00 PCB, Water Flow, 2.5 gpm · 00-671879-00 PCB, Water Flow, .25 gpm · 00-671880-00 PCB, RF Etch Monitor · 00-673526-01 PCB, Interlock Stop · 00-678450-01 PCB, Power Control 3kW · 00-686082-00 PCB, Impedance Interface · 00-680682-00 PCB, Power Indicator · 00-684661-00 PCB, Relay, Time Delay · 71-625025-00 Gage, Shield · 00-671683-00 Shield, Inner Isolation · 00-685964-00 Shield, Seal Plate · 00-664447-00 Shield, Heater Blank Off · 00-684879-00 Shield, RF Etch, 5″ · 00-685053-00 Shield, Anode · 00-664267-00 Shield, Ram Bellows · 00-664282-00 Shield, P/P Ram · 00-684320-00 Shield, L/L Particle Reduction · 00-680035-01 Shield, RF Etch Ring · 00-674836-00 Shield, Front Plate · 00-664347-00 Shield, Screw Cavity · 00-683521-02 Shield, Upper Chamber, 2 pcs · 04-716736-01 Shield, Rear Plate · 04-712093-03 Shield, 5″ P/P Cavity · 00-674780-00 Shield, Ceramic Ring 4″ · 00-677895-01 Shield, Dark Space · 04-715876-01 Clip · 00-677815-01 Shield, Cavity · 00-678216-00 Shutter · 00-678474-00 Sheild, Cross Contamination · 00-685957-00 Ion Gauge Baffle · 04-716545-01 Shield, P/P Cavity · 04-717627-01 Shield, Baffle · 04-711877-01 Shield, Preheat Cover · 00-681028-00 Shield, Load Lock · 00-678067-01 Shield, RF Igniter Flange · 00-681176-00 Shield, Ceramic Ring, 6″ · 00-683707-01 Shield, Heater Flange · 00-684747-00 Kit, CV Mask, 5″ · 00-677908-06 Shutter · 00-685485-00 Table Shield 5″ · 00-685951-00 Shield, ViPS Can · 04-710446-06 Shield, P/P Ram w/Insert · 04-712094-01 Shield, L/L Ram w/Insert · 04-712094-02 Shield, L/L Ram Cone · 04-712159-01 Shield, Center Ram · 04-712188-01 Shield, Upper Chamber · 04-712190-01 Shield, Screw · 04-712209-01 Shield, Dark Space · 04-715761-02 Shield, Lower Chamber · 04-717647-01 Shield, Feedthru, ViPS · 04-717624-00 Feedthru, Filament · 04-717624-01 Shield, Filament Feedthru · 04-717625-01 Shield, 6″ RF Cover · 04-721165-01 Feedthru, Rotary Shutter · 28-274973-00 Feedthru, Hi-Voltage 12kV · 954-5119 Valve, Needle · 951-509 Valve, Argon Kit · 00-672243-00 Valve, Needle · 27-180250-00 Valve, 11/2″ Pneumatic · 00-684383-00 Valve, Argon Pressure · 00-674923-00 Valve, Solenoid, 120V · 27-179903-00 Valve, Needle Etch Head · 00-678619-01 Valve, Manifold Assy. · 00-674567-00 Valve, Needle, Preheat · 04-720432-01 Solenoid, Kit · 1291-6267-71-190 Valve, Subbase 231B · 27-179818-00 Valve, Flow Control · 27-180254-00 Valve, Needle · 27-180475-00 Valve, Needle · 27-180476-00 Valve, Pressure Relief · 04-716531-01 Valve, Needle 1/4 Straight · B-45G Valve, Hi-Vac · Q1089-305 Valve, Hi-Vac · X9-515229-00 Power Supply, SUDC · 00-672250-00 Power Supply, 6KW · 00-681049-00 Power Supply, 12KW · 04-722791-01 Power Supply · 04-717511-02 Veriflo Regulator, 0-30 PSI · 41500777 Wahl Plate, Temperature · 101-4-177C Temp. Plate, 8 Position · 101-8-176-C Wasco Switch, 30″ HG · V110-31W-X/6284 Whitman Switch, 28″ HG · 00-674929-00 Switch, 60 PSIG · 00-671150-00 Switch, 35 PSIG · 00-673190-00 Switch, 10 PSIG · 00-674927-01 Please contact us for more information on the product: Your Name*: Your Email: Your Message: Captchac Code Submit: [dynamichidden dynamichidden-813 "CF7_URL"] Δ ID-SS10770-S-1 Share the post "Varian Spare Parts" FacebookXShare…
Varian
