AG Quartz Tube Tray
$20.79
$33.47
Description OEM Quartz Tubes and Quartz Trays for AG Associates Heatpulse RTP Systems: High-quality quartz components are essential to ensure optimal thermal uniformity, repeatability, and system longevity in AG Associates Heatpulse Rapid Thermal Processors (RTPs). We provide OEM-grade quartz tubes and quartz trays specifically engineered for models including: Heatpulse 210, 310, 410, 610, 4100, 4100S, 4108, 8008, 8108, and 8800. Substituting these parts with low-grade or second-source quartz components can cause thermal distortion, inconsistent wafer processing, and premature system wear. Our quartz products are manufactured to meet the original specifications for: Precise dimensional tolerances High purity quartz (low contamination) Superior thermal shock resistance Excellent optical and chemical stability under high-temperature RTP conditions With over 25 years of experience supplying the semiconductor industry, we are a trusted source for genuine quartz tubes and trays that maintain the integrity and performance of your RTP equipment. We also offer custom quartz tube and tray fabrication for specialized or non-standard RTP applications. Contact us today for: OEM quartz tubes for AG Heatpulse RTP OEM quartz trays for AG Heatpulse RTP Custom quartz solutions for RTP systems Ensure your Rapid Thermal Processing equipment runs at peak performance — trust only proven quartz components. Item No. Part Number Description 1 7100-1844-01D Tray 8″ Removable Pins 2 7100-4033-01B Tray 8″ Removable Pins DTC 3 7100-5727-01D Assembly Tray 8″ Removable Pins 4 7100-5730-01B Assembly Tray 6″ Removable Pins 5 7100-5897-01A Assembly Tray 6″ Removable Pins EZ-DTC 6 7100-5898-01A Assembly Tray 8″ Removable Pins EZ-DTC 7 7100-5993-02B Assembly Tray 8″ Ceramic Shield 8108 8 7100-5994-02C Assembly Tray 8″ EZ-DTC Ceramic Shield 9 7100-5995-02C Assembly Tray 6″ Ceramic Shield 8108 10 7100-5996-02C Assembly Tray 6″ EZ-DTC Ceramic Shield 11 7100-6360-01A Assembly Tray 4″ Ceramic Shield 12 7100-6361-01A Assembly Tray 5″ Ceramic Shield 13 7100-7468-01A Tray 8″ Removable Pins 14 7310-0692-02E M-Tray Slip Free 6″ 15 7310-10364-01P1 Tray 6″ Susceptor 16 7310-1644-01B Tray 8″ TC Wafer 17 7310-1766-01C M-Tray Slip Free Option 4″ 18 7310-1766-02C M-Tray Slip Free Option 5″ 19 7310-2841-02N Isolation Tube Quartz Liner 8″ 20 7310-2842-03D Isolation Tube 6″ 21 7310-2843-01A Tray 8″ Removable Pins 22 7310-2881-01E Tray DTC 8″ with Pins 23 7310-2881-02E Tray DTC 8″ without Pins 24 7310-2885-01D Baffle Quartz DTC 25 7310-2908-01B Tray Quartz 5″ DTC 26 7310-2935-01A Tray Quartz 6″ DTC 27 7310-2946-01A Tray Quartz 5″ DTC No Slip Free 28 7310-2998-01A M-Tray Slip Free 3″ Wafer 29 7310-3008-02D Tray DTC 6″ 30 7310-3009-01G Liner Quartz 8″ 31 7310-3010-02B Liner Quartz 6″ 32 7310-3027-01A Tray 6″ TC 33 7310-3452-01A Isolation Tube 8″ without ERP Window 34 7310-3575-01A Inlay Quartz 35 7310-3651-01A Tray Slip Free 4″ 36 7310-4434-01A Tray 4″ 8108 37 7310-4763-01B Inlay Quartz 38 7310-4764-01B Pin Quartz Tray 39 7310-4765-02C Tray 8″ Removable Pins 40 7310-4769-01A Tray 6″ Removable Pins 41 7310-4781-01A Tray 4″ Wafer Support Pin 42 7310-5055-01B Tray 6″ Removable Pins EZ-DTC 43 7310-5056-01A Tray 8″ Removable Pins EZ-DTC 44 7310-5110-01P2 Tray Ceramic Shield 45 7310-5111-01P2 Tray Ceramic Shield 46 7310-5154-01B Tray 4″ Autoloader 47 7310-5190-02B Tray Ceramic Shield 8″ 8108 48 7310-5192-02C Tray Ceramic Shield 8″ EZ-DTC 49 7310-5193-01A Pin Ceramic Shield EZ-DTC 50 7310-5195-02B Tray Ceramic Shield 6″ 8108 51 7310-5198-02C Tray Ceramic Shield 6″ EZ-DTC 52 7310-5769-01M Isolation Tube Quartz Liner 8″ 53 7310-6043-01A Tray Ceramic Shield 4″ EZ-DTC 54 7310-6046-01A Tray Ceramic Shield 5″ EZ-DTC 55 7310-6794-01A Chuck Quartz Hot EE 56 7310-6961-01P1 Isolation Tube Quartz Liner 8″ without ERP Window 57 7310-7788-01P1 Tray 3″ 8108 58 7310-8281-01A Pin Quartz 8″ Tray 59 7310-8838-01 Tray 3-6″ Susceptor 60 7310-9007-01P1 Isolation Tube Opaque Flanges 61 7310-9620-04A Tube Quartz 8800 Steam Double Contained 62 7310-9652-01U1 Tray for Autoloader EZ-DTC 63 7310-9653-01A Isolation Tube Opaque Quartz Liner 64 7310-9653-01P1 Isolation Tube Opaque Quartz Liner 65 7310-9817-02P2 Tray Ceramic Novellus 8″ 66 7310-9887-01P1 Isolation Tube Quartz Liner Thk Flange 67 7310-9922-01P1 Susceptor Tray with TC 68 7400-0003F Tray 5″ Wafer – 610 69 7400-0004G Tray 4″ Wafer – 410 70 7400-0008E Tray 4″ Wafer – 610 71 7400-0010H Tray Research – 610 72 7400-0011G Ga As Research Tray – 410 73 7400-0012C Wafer Pin Support – 410, 610 74 7400-0013D Cover Research Tray – 410 75 7400-0017D Cover Research Tray – 610 76 7400-0019F Tray 3″ Wafer – 610 77 7400-0020D Tray 4″ – 2106 78 7400-0022B Tray 6″ – 2106 79 7400-0023-01M Tube Isolation 80 7400-0024-01C Rod Quartz 3.50 81 7400-0024-02C Rod Quartz 2.55 82 7400-0024-03C Rod Quartz 0.45 83 7400-0024-04C Rod Quartz 0.40 84 7400-0035C Plate Thermocouple Holder 85 7400-0036F Inlay – Floating Door 86 7400-0046C Pin Quartz Vac Pan 87 7400-0060-01G M-Tray 4″ 88 7400-0060-02G M-Tray 5″ 89 7400-0060-04G M-Tray 3″ 90 7400-0061-02C Pin Wafer Cooling Station 91 7400-0062-01G M-Tray Auto 6″ 92 7400-0063-04H M-Tray Manual System 2″ – 610 93 7400-0063-05H M-Tray Manual System 3″ – 610 94 7400-0063-06H M-Tray Manual System 4″ – 610 95 7400-0063-07H M-Tray Manual System 5″ – 610 96 7400-0063-08H M-Tray Manual System 2″ – 410 97 7400-0063-09H M-Tray Manual System 3″ – 410 98 7400-0063-10H M-Tray Manual System 4″ – 410 99 7400-0066-02 Isolation Tube ERP Manual Systems 100 7400-0066-03N Isolation Tube ERP Manual Systems 101 7400-0068-04N Isolation Tube Dual Perf Baffle 102 7400-0082-01F M-Tray 6″ Manual Systems 103 7400-0084-03C Tray Ga As Susceptor Manual System – 410 104 7400-0084-04C Tray Ga As Susceptor Manual System – 610 105 7400-0085-07M M-Tray Slip Free Option 4″ 106 7400-0085-08M M-Tray Slip Free Option 5″ 107 7400-0085-09M M-Tray Slip Free Option 6″ 108 7400-0089-01B Pin 3″ Wafer Cooling Station 109 7400-0097-05C Tray Slip Free Manual System 4″ 110 7400-0097-06C Tray Slip Free Manual System 5″ 111 7400-0097-07C Tray Slip Free Manual System 6″ 112 7400-0100-06K Isolation Tube 113 7400-0101-06R Tray 8″ 114 7400-0102-01C Inlay Quartz 115 7400-0104-02C Susceptor Tray 4100 116 7400-0105-01C Support Pin 117 7400-0105-02C Support Pin 118 7400-0106-06J Tray 6″ 119 7400-0107-01A Tray TC Inconel 5″ 120 7400-0108-01B Pin Support Cover 121 7400-0109-06K Tray Slip Free 5″ 122 7400-0111-01E M-Tray Auto 6″ 123 7400-0123-01C Susceptor Tray Autoloader 6″ 124 7400-0132-01C Inlay Floating Door 125 7400-0133-03G Tray 8″ Removable Pins 126 7400-0134-01C Pin Quartz 8″ Tray 127 7400-0136-01B Baffle Quartz 128 9000-0670 REV 1 Tray 4″ Wafer 129 9000-0690 REV 1 Tray 5″ Wafer 130 9000-0860A Tray 6″ Wafer 131 9010-0020 REV 2 Wafer Pin Support 132 9010-0050 REV 2 Wafer Cover 133 9010-0130C Diffusion Tube 134 9010-0270 REV 2 Pin Support Sample 135 9010-0300 REV 6 Tray Research 4″ Wafer 136 9010-0420 REV 2 Tray 4″ Wafer 137 9010-0440C Plug 138 9020-0060-01K Tube Quartz 139 9020-0070E Tray 4″ Wafer 140 9020-1920A Pin 141 9030-0200H Chuck II 142 9030-0350C Pin Quartz 143 9030-0380D Tray 4″ Wafer Valid Time: Subject to prior sale. 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Quartz Ceramic Silicon