Tegal Parts in stock

Description Tegal Spare Parts in stock for Tegal 901e , Tegal 903e , Tegal 901 , Tegal 903 , Tegal 981e , Tegal 983e , Tegal 700 , Tegal 701 , Tegal 703 , Tegal 801 , Tegal 803 , Tegal 421 , Tegal 415 , Tegal 965 , Tegal 915 ,Tegal 1500e , Tegal 1501e , Tegal 1503e , Tegal 1600 , Tegal 1601e , Tegal 1611 , Tegal 1612 , Tegal 1603e , Tegal 6000 , Tegal 6500 , Tegal 6510 . You can use “Ctrl” ”F” to search Part No. at this page easily. Part No. Part No. Part No. Part No. 20-001-043 46-511-001 80-195-181 80-530-133 29-146-001 46-527-001 80-195-191 80-530-135 30-070-002 46-571-001 80-195-199 80-530-137 30-096-001 46-577-001 80-195-221 80-530-162 30-096-003 46-618-002 80-195-238 80-530-174 30-131-002 49-007-001 80-195-239 80-561-011 30-231-001 49-019-001 80-195-259 80-620-006 30-235-003 49-020-001 80-195-278 80-620-021 30-251-001 49-025-001 80-195-285 80-620-024 31-001-001 49-031-001 80-195-285SS 80-640-018 31-002-001 49-046-002 80-195-287 80-640-019 31-165-001 49-047-001 80-195-310 80-645-011 31-232-001 50-014-001 80-195-312 80-645-014 31-277-001 50-016-001 80-195-316 80-645-021 31-319-001 50-022-001 80-195-323 80-650-001 31-362-001 50-039-001 80-195-325 80-650-029 33-027-002 51-084-001 80-195-357 80-650-030 33-028-001 51-092-001 80-197-001 80-650-031 33-041-002 51-106-001 80-197-004 80-650-036 33-104-001 51-114-001 80-197-013 80-650-047 33-167-004 51-147-001 80-197-014 80-650-053 33-212-001 51-148-001 80-197-032 80-660-012 33-333-004 51-150-001 80-197-038 80-660-018 33-337-001 51-151-001 80-197-040 80-670-018 33-342-001 51-182-001 80-197-041 80-671-006 38-019-001 52-045-001 80-197-046 80-671-007 38-020-001 52-046-001 80-197-049 80-671-012 38-848-004 52-047-002 80-198-033 80-671-034 38-900-001 52-048-001 80-198-045 80-671-056 39-021-001 52-054-001 80-198-055 80-671-057 39-028-001 52-058-002 80-198-056 80-671-058 39-113-003 52-058-006 80-198-089 80-671-059 39-115-001 52-059-001 80-200-024 80-671-064 39-139-001 52-060-001 80-200-040 80-671-065 39-142-002 52-062-001 80-200-057 80-671-066 39-256-001 52-063-001 80-200-075 80-671-066G 39-292-003 54-001-001 80-200-087 80-671-067 39-306-001 54-001-002 80-200-104 80-671-068 39-336-018 56-009-001 80-200-122 80-671-069 39-340-002 56-039-001 80-200-122 80-671-070 39-341-002 56-042-001 80-200-183 80-671-071 39-343-001 57-028-001 80-200-185 80-671-072 39-344-001 59-008-001 80-200-187 80-678-004 39-350-002 59-011-001 80-200-188 80-678-011 39-352-100 80-041-000 80-200-195 80-678-013 39-360-002 80-041-001 80-200-210 80-678-029 39-376-001 80-041-003 80-200-216 80-679-001 39-376-002 80-055-048 80-200-275 80-679-012 39-379-001 80-055-140 80-200-302 80-680-028 39-409-001 80-080-028 80-200-304 80-680-032 39-420-002 80-080-029 80-200-305 80-680-040 39-424-001 80-080-031 80-200-314 80-680-056U 39-428-001 80-080-036 80-200-344 80-680-095 39-429-001 80-080-038 80-200-396 80-680-100 39-436-001 80-080-041 80-200-422 80-680-144 39-437-001 80-080-054 80-202-005 80-680-163 39-443-001 80-080-085 80-202-010 80-700-009 39-450-001 80-080-093 80-202-027 80-700-010 39-459-003 80-095-001 80-202-034 80-700-012 39-524-001 80-095-007 80-202-043 80-700-046 39-533-001 80-095-010 80-202-046 80-700-124 39-561-001 80-095-012 80-202-060 80-700-125 39-563-001 80-095-017 80-202-061 80-700-127 39-604-001 80-095-019 80-202-073 80-700-128 39-622-001 80-095-025 80-202-083 80-700-131 39-628-001 80-095-049 80-202-095 80-700-132 39-633-001 80-095-057 80-202-110 80-700-133 39-636-001 80-095-063 80-202-111 80-700-143 39-637-001 80-095-090 80-202-112 80-700-146 39-639-001 80-095-107 80-202-113 80-700-150 39-654-001 80-095-108 80-202-119 80-700-153 39-655-001 80-095-117 80-202-120 80-700-154 39-659-001 80-095-185 80-202-125 80-700-155 39-659-002 80-095-195 80-202-126 80-700-156 39-662-001 80-095-196 80-202-127 80-700-160 39-675-001 80-095-197 80-202-128 80-700-161 39-676-001 80-095-205 80-202-129 80-700-162 39-680-003 80-095-220 80-202-130 80-700-163 39-682-001 80-095-255 80-202-131 80-700-164 39-683-001 80-095-256 80-202-148 80-700-166 39-687-002 80-095-278 80-202-154 80-700-167 39-689-001 80-101-006 80-202-155 80-700-173 39-694-001 80-107-003 80-202-156 80-700-174 39-696-001 80-127-022 80-202-183 80-700-177 39-699-001 80-127-023 80-202-186 80-700-178 39-700-007 80-127-042 80-202-188 80-700-180 39-707-001 80-127-063 80-202-190S 80-700-185 39-710-001 80-127-101 80-202-212 80-700-186 39-711-001 80-127-102 80-202-214 80-700-188 39-725-001 80-127-104 80-202-219 80-700-198 39-726-001 80-127-105 80-202-227 80-700-199 39-729-001 80-127-122 80-202-234 80-700-201 39-731-001 80-127-123 80-202-236 80-700-203 39-733-003 80-127-124 80-202-238 80-700-205 39-733-004 80-127-141 80-202-239 80-700-206 39-735-003 80-127-142 80-202-242 80-700-214 39-735-007 80-127-143 80-202-243 80-700-215 39-735-008 80-127-144 80-202-244 80-700-218 39-750-001 80-127-147 80-202-246 80-700-219 39-751-001 80-127-161 80-202-247 80-700-220 39-756-002 80-127-162 80-202-248 80-700-221 39-757-003 80-127-163 80-202-250 80-700-222 39-758-001 80-127-164 80-202-252 80-700-230 39-776-001 80-127-167 80-202-253 80-700-231 39-797-001 80-127-183 80-202-256 80-700-236 39-804-001 80-127-262 80-202-272 80-700-250 39-815-001 80-127-273 80-202-274 80-700-254 39-815-003 80-127-321 80-202-284 80-700-259 39-817-001 80-127-325 80-202-286 80-700-259A 39-819-001 80-127-343 80-202-289 80-700-261 39-833-001 80-127-350 80-202-290 80-700-265 39-847-002 80-127-361 80-202-291 80-700-292 39-848-003 80-127-362 80-202-293 80-700-293 39-848-005 80-127-363 80-202-294 80-700-294 39-852-001 80-127-364 80-202-295 80-700-358 39-852-002 80-127-365 80-202-296 80-700-359 39-852-004 80-127-366 80-202-298 80-700-418 39-853-002 80-127-367 80-202-301 80-700-419 39-853-004 80-127-368 80-202-302 80-700-585 39-854-001A 80-127-369 80-202-312 80-710-025 39-854-001B 80-127-370 80-202-313 80-750-038 39-854-001C 80-127-371 80-202-317 80-753-001 39-855-001 80-127-383 80-202-319 80-753-004 39-856-001 80-127-384 80-202-321 80-753-064 39-857-001 80-127-385 80-202-327 80-780-001 39-858-001 80-127-386 80-202-328 80-812-040 39-858-001A 80-127-421 80-202-338 80-888-062 39-860-001 80-127-523 80-202-341 81-006-010 39-868-001 80-127-542 80-202-350 81-006-012 39-869-001 80-127-561 80-202-361 81-006-031 39-870-001 80-127-562 80-202-362 81-007-015 39-872-001 80-127-565 80-202-367 81-007-063 39-908-001 80-127-641 80-202-389 81-007-077 39-926-001 80-127-642 80-202-390 81-007-099 39-927-008 80-127-824 80-202-391 81-007-107 39-929-001 80-127-825 80-202-392 81-007-137 39-954-001 80-127-827 80-202-393 81-007-138 39-954-002 80-127-828 80-202-394 81-007-145 39-954-003 80-128-065 80-202-396 81-007-146 39-967-002 80-128-143 80-202-397 81-101-014 40-003-001 80-128-170 80-202-402 81-101-017 40-003-002 80-150-011 80-202-404 81-101-018 40-005-001 80-150-016 80-202-405 81-105-207 40-007-001 80-150-061 80-202-408 81-105-209 40-011-001 80-150-116 80-202-410 81-105-217 40-012-001 80-150-131 80-202-411 81-105-227 40-017-002 80-150-151 80-202-413 81-105-232 40-044-001 80-150-172 80-202-432 81-105-235 40-053-001 80-150-176 80-202-434 81-200-021 40-065-001 80-150-184 80-202-436 81-200-056 40-102-002 80-150-206 80-202-440 83-002-001 40-169-001 80-150-207 80-202-471 83-003-001 40-177-001 80-151-181 80-202-494 83-004-002 40-178-001 80-151-185 80-210-009 83-011-007 40-230-001 80-152-003 80-300-001 83-042-001 40-242-001 80-152-004 80-305-001 83-084-001 40-256-001 80-152-006 80-305-002 83-124-001 40-283-04M 80-152-008 80-305-003 83-161-001 40-286-001 80-153-002 80-305-004 83-176-001 40-287-001 80-153-004 80-305-005 83-176-002 40-289-001 80-159-002 80-305-011 83-176-003 40-290-001 80-162-001 80-320-005 83-176-004 40-294-003 80-162-002 80-320-006 83-176-005 40-309-001 80-162-003 80-330-006 83-178-001 40-349-001 80-162-005 80-370-008 93-027-003 40-366-001 80-162-006 80-370-010 93-028-001 40-374-003 80-162-007 80-380-040 93-033-005 40-374-004 80-163-001 80-400-025 93-033-006 40-391-001 80-163-002 80-400-042 93-044-001 40-392-001 80-163-003 80-400-049 93-118-002 40-395-001U 80-163-004 80-400-057 93-137-002 40-425-001 80-163-005 80-400-061 93-219-001 40-425-002 80-163-006 80-400-063 93-220-001 40-516-006 80-165-002 80-400-065 93-498-002 40-730-001 80-165-003 80-400-066 93-523-003 40-731-001 80-165-004 80-400-068 94-020-001 40-926-001 80-165-005 80-400-073 94-131-003 41-037-001 80-165-008 80-400-077 94-144-002 41-046-001 80-165-014 80-400-084 94-144-002A 41-047-002 80-165-025 80-400-090 94-176-001 41-103-001 80-165-026 80-400-092 94-212-001 41-112-001 80-165-027 80-400-096 94-316-001 41-115-001 80-165-035 80-400-097 94-450-001 41-118-001 80-165-036 80-400-099 98-019-001 41-118-002 80-170-002 80-401-006 98-125-008 41-118-003 80-170-003 80-401-008 98-172-003 41-127-001 80-170-013 80-401-014 98-203-001 41-136-003 80-170-018 80-401-017 98-209-001 41-136-004 80-170-025 80-402-042 98-223-002 41-172-001 80-170-028 80-402-044 98-224-001 41-176-001 80-170-028A 80-402-049 98-246-001 41-177-001 80-170-029 80-402-073 98-247-002 41-189-001 80-170-042 80-405-015 98-309-001 41-206-001 80-170-043 80-415-006 99-002-004 41-207-001 80-172-042 80-415-007 99-003-002 41-214-002 80-172-048 80-415-008 99-005-001 42-100-001 80-172-049 80-415-009 99-008-001 42-185-001 80-172-050 80-415-012 99-013-001 42-185-003 80-172-052 80-415-013 99-037-001 42-271-005 80-172-058 80-415-014 99-043-002 42-281-001 80-192-074 80-415-018 99-044-002 42-282-002 80-192-112 80-415-021 99-045-001 42-282-003 80-192-116 80-415-026 99-046-001 42-285-002 80-192-133 80-415-028 99-046-502 42-293-001 80-192-139 80-415-034 99-047-001 42-307-001 80-192-153 80-415-035 99-054-001 42-328-002 80-192-153SS 80-415-036 99-079-001 42-331-002 80-192-155 80-450-021 99-079-002 42-335-002 80-192-159 80-450-030 99-081-001 42-346-002 80-192-160 80-500-002 99-082-004 42-360-001 80-192-161 80-500-008 99-095-001 42-446-001 80-192-162 80-505-001 99-098-003 42-449-001 80-192-163 80-510-001 99-099-001 42-456-002 80-192-164 80-510-013 99-104-001 42-493-001 80-192-165 80-510-015 99-106-001 42-501-001 80-192-168 80-510-016 99-112-001 42-509-002 80-192-169 80-510-023 99-114-001 42-509-003 80-192-182 80-520-001 99-116-001 42-513-002 80-195-031 80-520-014 99-126-003 42-532-001 80-195-055 80-520-015 99-139-002 42-535-001 80-195-096 80-520-023 99-141-001 42-553-001 80-195-105 80-530-001 99-154-001 42-583-002 80-195-111 80-530-012 99-158-001 42-663-001 80-195-119 80-530-018 99-181-005 42-730-001 80-195-120 80-530-023 99-181-006 42-790-001 80-195-132 80-530-032 99-186-002 44-068-006 80-195-133 80-530-036 99-190-002 44-290-001 80-195-149 80-530-061 99-197-001 44-332-001 80-195-153 80-530-064 99-206-001 44-340-001 80-195-154 80-530-079 99-208-004 44-366-001 80-195-156 80-530-080 99-209-001 44-369-002 80-195-158 80-530-087 99-232-004 44-397-001 80-195-159 80-530-090 99-237-003 44-432-002 80-195-160 80-530-093 99-300-001 46-115-002 80-195-161 80-530-105 99-304-001 46-272-003 80-195-162 80-530-106 99-318-001 46-323-001 80-195-166 80-530-109 CC 1012-00101 46-469-002 80-195-167 80-530-113 CC 1106-01101 46-475-001 80-195-168 80-530-128 CW1078-60XXX 46-492-001 80-195-169 80-530-131 CW110500202 Other tegal items which might be available. 1 37-221-003 UPPER ELECTRODE 2 39-431-002 / FEEDTHROUGH-RF CERAMIC 39-431-002 / TEGAL 3 39-832-005 ELCTD TEMP CONT ANDZD T/15XXE 4 40-294-003D / CYLINDER, CERAMIC, LOWER ELECTRODE IT900 (4 INCH) / TEGAL 5 40-297-002 QUARTZ PIN 903 6 40-297-002 Tegal 903e Pin for Plasma Etcher 7 507008615 / AC/DC POWER SUPPLY FOR RF GENERATOR / TEGAL 8 80-095-278RW  PCB MICROPRCS CONTROLLER W/SLOW PROM 9 80-200-144 BUSHING,BEARING 10 901E Monthly PM O-ring kit, Tegal P/N 11 93-220-001 REV.A 12 98-176-001 / PCB SNS-1 SENSOR 15 90X / TEGAL 13 99-002-004 / PCB MOTHERBOARD 415 / TEGAL 14 99-003-002 / PCB PROCESS AUTOMATION / TEGAL 15 99-004-001 / PCB AUTO END POINT DETECT / TEGAL 16 99-013-001 / PCB 3 SET POINT TIMER 60HZ 515 / TEGAL 17 99-054-001 / PCB AUTOTUNE AT-1.5 415 / TEGAL 18 99-089-001 / PCB E6S-1 SENSOR BLANK / TEGAL 19 99-106-001 / PCB AUTOTUNE SLUG ATS-1 415 421 515 /  TEGAL 20 99-165-002 / PCB ESI-2 ELEVATOR SENSOR 900 / TEGAL 21 99-187-001 / PCB AUTOTUNE ATO-1 90X / TEGAL 22 99-187-002 / PCB AUTOTUNE 2 ATO-2 90X / TEGAL 23 99-197-001 / PCB SSL-1 SLOTTED SENSOR 90X / TEGAL 24 99-207-004 / PCB MICRO PROCESSOR / TEGAL 25 99-287-003 / SHUTTLE INTERFACE BOARD SST-3 / TEGAL 26 Acromag AVME 921X Circuit Board Tegal 6550 Etcher 27 Acromag AVME 9320 1018-473B Circuit Board Tegal 6550 Etcher 28 Acromag AVME 932X Circuit Board Tegal 6550 Etcher 29 ADM-3 POWER MONITOR PCB FOR TEGAL 9XXe SYSTEMS PN: 99-209-003 30 AIRTROL F-4200-60 Pressure Swtich, Tegal p/n: 80-679-008 31 AIRTROL F-4200-60 Pressure Swtich, Tegal p/n: 80-679-008 32 Applied Ceramics 40-588-003B Insulator Outer Tegal 95-00054A 33 Applied Ceramics 40-753-004-3 Disc Top Oblated Stripper Tegal New Surplus 34 APPLIED CERAMICS TEGAL RING, INSULATOR , OUTER 35 BURKS 81-007-145 SEAL PUMP TEGAL SEAL 1/2 TEPOLITE TGL-1013 PHANTOM 407098 36 Carrier ring 4 inch, Tegal P/N 37 CAT 99-142-001 PCB ADIS-1 TEGAL 915 38 CD1009-00301 /  903E MICROPROCESSOR BOARD FOR PLASMA ETCHER / TEGAL 39 CERAMIC STANDOFF 1/2 OD X 3/4 LG 6-32 (TEGAL) 80-170-013 40 CollabRx/Tegal CD1043-00601 Industrial Main Controller Control Module/Plug-In 41 Comdel T1000E/RF RF Signal Generator Supply Tegal T-1000E 42 Comdel T1000E/RF RF Signal Generator Supply Tegal T-1000E 43 CR1113-00301EX / MATCHING NETWORK / TEGAL 44 CR1113-00801RW / TEGAL PLASMA, REWORK-MATCHING NETWORK / TEGAL 45 Curved indexer block, Tegal P/N 8100-1091 46 DC POWER DISTRIBUTION 47 DC POWER SUPPLY 48 DIRECTIONAL POWER DETECTOR MODEL 3008 49 ECM 0-1-115 Tegal  93-101-006 Rev E Cable RF p/n 39–804-001 1 , 41-147-001 50 Edwards 1850 Mechanical Vacuum Throttle Valve ISO200 Tegal 6500 51 Edwards W185-08-001 Mechanical Vacuum Throttle Valve 1850 ISO200 Tegal 6500 Used 52 Endpoint cable, Fiber Optic, Tegal P/N 80-207-159 53 EPROM Firmware Load/Unload, Tegal P/N 26-003-001 54 FRONT PANEL INTERFACE BOARD 55 GAS INTERFACE BOARD 56 GCA 66635-14 Circulating System Tegal Precision Scientific 57 Integrated Circuit Support ICS-40-297-002 Quartz Pin, Tegal 40-297-002 58 Isel 10-27-0038 Atmospheric Elevator Tegal 80-055-717 w/Platform & Cables Spare 59 Isel Robotik 10-27-0038 7″ Atmospheric Elevator Robot Tegal 80-055-717 Working 60 Isel Robotik 10-27-0038 7″ Atmospheric Elevator Tegal 80-055-717 61 Last one 62 Lot of 3 Tegal 41-137-001, Chuck, BTTM Flag 903, 410518 63 Lot of 5 Tegal 80-202-190, O-R 10, 1/2ID 3/16W, D70, 410520 64 Manifold weldment, 3 line with ultratorr fitting, Tegal P/N 33-091-001 65 Manifold weldment, 4 line with ultratorr fitting, Tegal P/N 66 Manual for Tegal 801/803, operational and maintenance, schematic manual 67 manual for Tegal 804 68 MATCHING NETWORK 69 MATCHING NETWORK INTERFACE 70 MEMORY AND BAUD EXPANSION PCB 71 MOTOR, Belt drive Barber Coleman, Tegal P/N 72 NEW Tegal Industrial Heated Upper Electrode Chamber Assembly Unit 39-700-007 73 NEW Tegal Industrial Lab Plasma Etcher Upper Body Chamber Ring w/Viewing Port #2 74 NEW Tegal Industrial Lab Upper Body Chamber Ring w/Viewing Side Ports 39-662-002 75 New Tegal TGL 99-013-001 Rev. G SET-1 Circuit Board TGL 99-013-001 76 New Tegal TGL 99-106-001 PCB ATS Auto Tune Slug / 99-106-001 Rev.K 77 New Tegal TGL 99-106-001 PCB ATS Auto Tune Slug Printed Circuit Board 78 OEM Part TEGAL 39-34-005 Chamber body 903E 79 OEM Part TEGAL 39-341-005 CHAMBER BODY 80 OEM Part TEGAL 40-297-110C TEGAL 40-297-110C Pin Ceramic 901 81 ORIENTAL MOTOR PH266L-33 STEPPER MOTOR 24V 0.3A 1.8/STEP, TEGAL 901E / 903E 82 PCB UCT FRONT PANEL INTERFACE 83 PCB, Process Control, Tegal P/N 99-019-02 84 PCB, Sensor with cables, Tegal P/N 99-089-001 85 PCB, TEGAL Main,   Tegal P/N 99-114-001, 99-117-001 86 PCB, Tegal P/N 99-095-001 87 Photocell, Tegal P/N 80-500-007 88 PROFACTURE PCB TMC-4 Temperature Monitor Control PRO-99-138-004 89 PROFACTURE TEGAL ICG-6 Gas Interface Board 90 Qualidyne 234AA0A-0172 Power Supply 23092EFG Tegal VME-PS400-01 91 QUARTZ LIFT PINS TEGAL 903ACS, 903e  40-297-002 Rev E  5 PIN LOTS 92 RF Match Box for Tegal 803 93 RFPP RF Plasma Products T-501 RF Generator Tegal CR1087-20101 94 RFPP RF Plasma Products T-502S RF Generator Tegal CR1087-20101 95 RING INSULATOR CERAMIC .20-99.5% 96 Risshi/Tegal YR-9030DHF(T) 2-Ch. Constant Temperature Circulator/Heat Exchanger 97 Risshi/Tegal YR-9030DHI(T) 2-Ch. Constant Temperature Circulator/Heat Exchanger 98 Sekidenko 2000 Optical Fiber Thermometer Tegal 950-2013-01 Tegal 6550 99 Semi Parts SPI-99-247-003ALT Spatula Inerface SPI-3, Tegal 99-247-003 100 Semitool 26-096-004 949298-00 Spin Rinse Dryer 6500 OEM Controller Tegal 6550 101 Sensor, Cybeq, Siltec, Tegal P/N 0121-6260-100 102 Sensor, E4 Ring Present, Tegal P/N 103 Sensor, temperature, Tegal P/N 104 SET OF BELTS FOR SENDER RECEIVER  TEGAL 901  903 105 SET OF O-RING,ROD SAPPHIRE 106 Shaft, Tegal P/N 50-007-001 107 SHUTTLE INTERFACE BOARD WORKING 108 SHUTTLE INTERFACE PCB  SST 3 109 SMC / Tegal 98-008-01 Rev-B PCB Assy ULUSP-98008-01 110 Spectron Engineering SE130WB Lab/Industrial Optical Assembly Unit 111 SPI-99-224-001 Center Sensor, CSN-1, PCB, Tegal 99-224-001 112 Swagelok/NuPro SS-8BAK-1C-2228 6LV-BNBW4-C Bellows Valve Assembly 113 Switch, Tegal P/N 80-678-004 114 Switch, Tegal P/N 80-678-014 115 Tegal  903e Plasma ETCHER Quartz Pins, Set of 6, 40-297-002 116 TEGAL  Plasma ETCHER SST TEMPERATURE PROBE, P/N 80095-057, NOS 117 Tegal ,  RF Match 118 Tegal / Bay Pneumatic 80-095-217 BES-530-8-8-24-OMT-R BES-530-8-PCB Pneumatic 119 Tegal 00755601 Temperature Display Board, PCB 120 Tegal 0100-00136 Pcb Circuit Board Rev C 121 TEGAL 03601-22-040 / 0360122040 122 Tegal 045-048 Temperature Probe Assembly for 903e 123 Tegal 07-175-004 RF CART AC MODULE w/ 1 Pipe Protect High Voltage Cable 124 Tegal 1011-00301 Display Board Assembly 125 TEGAL 211 PLASMA-ASHER 126 Tegal 211 Plasmaline Etcher Asher Chamber 127 Tegal 211 Plasmaline Industrial Semiconductor Etcher Asher Chamber Unit PARTS 128 Tegal 30-251-001 RF Conn Assy 129 Tegal 31-086-006 Wafer Etcher Microprocessor Mag Phase RF Input Output Module 130 Tegal 3152140-00B PEP 250-T Industrial Z-Match Antenna Tuner Module 131 TEGAL 33-337-001 INNER BELLOWS 132 Tegal 33-527-001 Bellow Chuck New Surplus 133 Tegal 37-231-602 Chuck Ring 134 Tegal 37-423-001 Rev.4 Industrial Lab Metal Disk w/ Dual Protruding Modules 135 Tegal 37-441-004 Cooling Flange 6500 HRe Dual Frequency Etch System 136 Tegal 39-680-003 Showerhead Electrode Cone Head Vented for 903e 137 Tegal 39-680-003 Showerhead Electrode Cone Head Vented for 903e Aluminum 9″ 138 Tegal 39-680-003, Electrode, Non-anodize shower head Tegal 903, Aluminum 139 Tegal 39-733-003 Lower Non-anodize Electrode 140 Tegal 39-735-003 Lower  Electrode, 5″ 141 Tegal 39-735-003 Lower Non-anodize Electrode 142 Tegal 40-046-001 Quartz Window Rev. D 143 Tegal 40-140-003D, Ring, Insultator, Ceramic 144 TEGAL 40-275-001 UPPER INSULATOR 145 Tegal 40-606-004 Ceramic Liner HRE2 146 TEGAL 41-215-001 GASKET GROUND RING RETAINER FOR USE WITH SOLID GROUND 147 Tegal 41-238-008 RF Shield React Fill 148 Tegal 41-399-001 Gasket, RF-90Xe 149 TEGAL 415 PLASMA ASHER 150 TEGAL 42-401-001 Bracket Slide Rear LH  T915 151 Tegal 42-841-001 Rev.B Industrial Upper Chamber Assembly 39-700-007 Rev.A PARTS 152 Tegal 46-952-002 Stripper Gas Panel UFC-1100A As-Is 153 Tegal 50566-02-ISS3 AUX/RF Controller Control Module/Board/Card 83-126-003 154 TEGAL 50590 01 155 TEGAL 50590 01 PCB 156 Tegal 50590-01 PCB Plasma Etching 157 Tegal 50590-01 Wafer Etcher Main Controller 80-095 CD1043 Daughter Board PCB 158 TEGAL 515 PLASMA ASHER (With ) 159 Tegal 53-024-003 Sensor Assembly 160 Tegal 53-025-001 Retina Lamp 161 TEGAL 58-027-001 162 Tegal 59-011-001, Linkage Top PL Latch 163 Tegal 6550 CC1326-00600 Chamber Stripper CR1324-00400 MTCH NTWK Source Strip 164 Tegal 701 Inline Automatic Wafer RF Plasma Etcher 165 Tegal 701 Plasma Inline Wafer RF Etcher Made in USA 166 TEGAL 701 RFG Plasma Inline Wafer RF Etcher, RF MATCH 167 TEGAL 701-SP MN RF Match Plasma in-line etcher 168 Tegal 80-095-1026 PCB MATCH CONTROLLER IP1.5 169 Tegal 80-095-270 50555-01 ISS-8 Wafer Etcher CD1043 Main Controller Module Board 170 TEGAL 80-095-278 PCB MICROPROCESSOR CONTROLLER 99-207-004, 107026 171 TEGAL 80-200-219 “SLIM-TRACK” BARNES ENG. CO.; SLIDE  CHAMBER T915 172 Tegal 80-202-046, Gromnet, 5/16ID, 7/16DIA Hole 173 Tegal 80-202-186, Timing Belt 174 TEGAL 80-202-291 175 TEGAL 80-202-361 Bearing 176 Tegal 803 Inline Automatic Wafer RF Plasma Etcher 177 Tegal 803 Inline Automatic Wafer RF Plasma Etcher 178 Tegal 803 Inline Wafer Automatic RF Plasma Etcher 179 Tegal 80-500-002 Photocell 250V 55K 180 Tegal 80-640-018 Profacture  For Tegal 901e 903e 12v 0.8w Bay Base 181 Tegal 80-678-029 Flow Switch,  AUTOFLOW FS574-587 182 Tegal 81-007-138  Bellow Plug for Plasma Etcher 900 Series 183 Tegal 81-105-223 Heater 120V 60Hz 184 TEGAL 83-099-001 Lift Pin 185 Tegal 83-126-003 Rev.C  Industrial/Laboratory Controller Aux Board Assy 186 Tegal 900 series upper Chamber, complete 187 Tegal 901e Plasma Etcher 188 Tegal 901e Plasma Etcher 901e Plasma Etcher #1 with ENI ACG-10 RF Power Supply 189 Tegal 903 Showerhead Profacture Pro-37-221-002 Electrode Upper 903E 190 TEGAL 903e ALUMINUM UPPER ELECTRODE,  NEW  PN: 39-680-003 Rev F 191 TEGAL 903e ALUMINUM UPPER ELECTRODE, NOS  PN: 39-680-003 Rev D 192 Tegal 903E CW 1078-40203 Send/Receive Sender/Receiver Spatula Drive/Driver 193 TEGAL 903e PLASMA ETCHER EIA-3 ELEVATOR PCB P/N 99-246-003 194 Tegal 903E PLASMA ETCHER PCB, 50590-01 195 Tegal 93-137-009, RF Cable 196 Tegal 94-400-001, Harness Sensor 197 Tegal 94-484-001 Cable Assy 198 Tegal 965 / 915 Plasma Asher / Removed Operational from facility /Complete/Clean 199 TEGAL 98-129-003 PCB CIRCUIT BOARD REV A NIB 200 Tegal 98-176-001 B 99-176-001 K Wafer Plasma Etcher Sensor SNS Board Assembly 201 Tegal 98-176-001 Pcb Circuit Board Rev D 202 Tegal 98-223-002 Pcb Circuit Board Rev B 203 TEGAL 98-249-001 PCB CIRCUIT BROAD REV 2 204 TEGAL 98-249-002 PCB CIRCUIT BOARD, REV C 205 TEGAL 98-287-002 PCB CIRCUIT BOARD REV A 206 Tegal 98-354-002 CPU Transition Board VME PCB Card 207 Tegal 98-363-00 VME Backplane Board PCB CTC-ML 208 Tegal 98-398-002 Pcb Circuit Board Rev A 209 Tegal 98-429-001 PCB 210 Tegal 99-052-001 PCB, AUX-1, 99-049-001 PCB 211 TEGAL 99-081-001 Gas control interface, GCS-1 PCB assy, used PCB board 212 TEGAL 99-081-001 Gas control interface, GCS-1 PCB board assy 213 TEGAL 99-082-003 gas control logic, GCL-3 PCB board assy 214 Tegal 99-089-001 Sensor and Cables for 903 or 915 Etcher/Asher 215 Tegal 99-096-09 DIP Board PCB Rev. G 216 Tegal 99-104-001, PCB Elevator Control, FAB 98-104-001 217 TEGAL 99-112-001 Top display control, TDC-1 PCB board assy 218 Tegal 99-126-005 903e IGC-5 PCB Module / Card for Plasma Etcher Semiconductor 219 Tegal 99-126-005 IGC-5 Gas Control PCB Rev. N 220 Tegal 99-126-005 IGC-5 PCB Rev. J for 901E and 903E 221 Tegal 99-126-005 PCB Gas Interface 222 TEGAL 99-126-005 REV H.IGC-5  PCB GAS INTERFACE CONTROLLER BOARD 223 TEGAL 99-126-005 REV P.IGC-5 98-126-005 PLASMA DS-5-4-002 CONTROLLER 224 Tegal 99-126-006 Interface Board PCB ICG-6 225 Tegal 99-126-006 PCB IGC-6 Gas Interface 226 Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-005 227 Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006 228 Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006 229 Tegal 99-129-003 Pcb Circuit Board Rev B 230 TEGAL 99-129-006 PCB CIRCUIT BOARD REV A NNB 231 Tegal 99-138-001 PCB Assembly, FAB 98-138-001 232 TEGAL 99-138-004 TEMP MONITOR CONTROL PCB. Rev.E, TMC-4 233 TEGAL 99-138-004 TEMPERATURE MONITOR CONTROL CONTROL BOARD, REV. E TMC-4 234 Tegal 99-160-006 Industrial/Laboratory Controller Board Assembly 235 Tegal 99-160-006 Rev.E Industrial/Laboratory RFI-6 Controller Board Assembly 236 TEGAL 99-165-003 B ESI  Plasma Etcher Etching 237 TEGAL 99-165-003 REV A ESI-3  Plasma Etcher Etching 238 Tegal 99-169-005 PHC-5 Wafer Etcher Detector Light Sensor Photocell Board PCB 239 Tegal 99-172-003 PCB 240 Tegal 99-173-003 RFG-3 PCB – Lot of 2 241 TEGAL 99-173-004  GENERATOR BOARD.  REV D 242 Tegal 99-173-004 Pcb Circuit Board Rev E 243 Tegal 99-173-004 PCB, RFG-4, RF Gen Interface 244 Tegal 99-173-005 PCB RFG-5 245 tegal 99-173-007 RF Interface PCB 246 Tegal 99-173-008 PCB, RFG-8, RF Gen Interface 247 Tegal 99-174-007 Rev.1 BPL-7 Industrial PCB Printed Circuit Board Card Unit 248 Tegal 99-174-008 REV A BPL-8 Wafer Module Driver Controller I/O Interface Board 249 Tegal 99-174-008 REV. A BPL-8 Wafer Etcher Interface Main  I/O Backplane Board 250 Tegal 99-174-008 REV-F BLP-8 Industrial PCB Printed Circuit Board Card Unit 251 Tegal 99-184-004 MIC-4 Main Controller Module CD1043 Interface Connector Board 252 Tegal 99-185-002 MMI-2 Wafer Etcher CD1043 Main Controller Rear Interface Board 253 Tegal 99-186-001 Rev. 2A Interface Board PCB Att-1 254 Tegal 99-187-002 ATO-2 Board 255 Tegal 99-187-002 ATO-2 Interface Board PCB Rev. B 256 Tegal 99-196-002 ATI-2 PCB Rev. W 257 Tegal 99-196-002 PCB ATI-2 for Tegal 901e 258 Tegal 99-196-003 ATI-3 Microprocessor Controller Module RF Processor Board Assy 259 Tegal 99-196-003 Rev.A Industrial ATI-3 Auto-Tune Board Assembly Unit 260 Tegal 99-200-005 M300353 903e Sensor Interface Spatula SIS-5 REV G 261 Tegal 99-200-005 PCB, SIS-5, Sensor Interface, 98-200-002 262 Tegal 99-200-005 Sensor Interface PCB SIS-5 263 TEGAL 99-200-300 REV. B, PCB SENSOR INTERFACE 264 Tegal 99-201-001 IIQ-1 REV D Wafer Chamber Etcher System Driver Interface Board 265 TEGAL 99-203-004 PCB  MNP-4  MTCH NTWK 266 Tegal 99-203-004 Rev G MNP-4 Control Board 267 Tegal 99-204-001 Rev. E OMD-1 Wafer Elevator Handling Selector Driver PCB Board 268 Tegal 99-207-004 MBE-4 Mem And Baud PCB Lagacy Semi Repaired 99-207-004RW 269 Tegal 99-207-004 MBE-4 Wafer Main Controller CD1043 Module PCB Daughter Board 270 Tegal 99-207-004 PCB 271 Tegal 99-207-004/K MBE-4 PCB 272 Tegal 99-209-002 Industrial AC/DC Power Monitor PCB Circuit Board Assembly 273 Tegal 99-209-003 Pcb Circuit Board Rev D 274 TEGAL 99-214-003 / G AME-3 275 TEGAL 99-214-003RW  Rev. A RWK-PCB ANE-3 AUTOTUNE 3 276 Tegal 99-217-001 SOH-1 Wafer Elevator Motor Transfer Selector PCB Board 277 Tegal 99-219-001 Wafer Elevator 15-Pin Interface Sensor Controller PCB Board 278 Tegal 99-223-002 Pcb Circuit Board Rev G 279 Tegal 99-223-002 PCB, DSN-2, Dual Sensor 280 Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001 281 Tegal 99-231-001 ITP-1 Wafer Etcher CE1029 DC Module Power Supply Board PCB 282 Tegal 99-232-003 Rev.5 M0C-3 Plug-In PCB Circuit Board Assembly Module 283 Tegal 99-232-003 Rev.P M0C-4 Plug-In PCB Circuit Board Assembly Module 284 Tegal 99-232-004 EX Plug-In PCB Circuit Board Assembly Module 285 Tegal 99-232-004 Rev.T M0C-4 Plug-In PCB Circuit Board Assembly Module 286 Tegal 99-232-004RW PCB 287 Tegal 99-235-004 Rev E MCM-4 Control Board 288 Tegal 99-237-002 Interface Board PCB EEP-2 289 Tegal 99-240-002 PCB 290 Tegal 99-240-003 PCB 291 Tegal 99-240-004 ETS-4 Wafer Etcher CD1043 Main Controller Daughter Board PCB 292 Tegal 99-247-002 PCB 293 Tegal 99-249-002 PCB For Tegal 901E & 903E Plasma Etcher 294 Tegal 99-253-001 PMT-1 Rev-K Industrial Board Module Assy 295 Tegal 99-261-002 MFC-2 Wafer Chamber Etcher Gas Delivery Interface Board PARTS 296 Tegal 99-261-002 REV.C MFC-2 Wafer Etcher Gas Flow Control Interface PCB Board 297 Tegal 99-261-002 Rev.C-MFC-2 Industrial/Laboratory Connector Board Assy 298 Tegal 99-261-002 Rev.C-MFC-2 Industrial/Laboratory Connector Board Assy 299 Tegal 99-287-001D REV C SST PCB 300 Tegal 99-287-003 PCB SST-3 Shuttle Interface 301 Tegal 99-287-003 SST-3 Board 302 Tegal 99-287-003RW Board 303 Tegal 99-287-003RW Platine 304 Tegal 99-287-003RW Platine 305 Tegal 99-299-001 REV. D MCR-1 Wafer Etcher Transfer Driver Interface PCB Board 306 Tegal 99-299-001 REV. F MCR-1 Wafer Etcher Transfer Driver Interface PCB Board 307 Tegal 99-299-001 Rev.F Industrial/Laboratory MCR-1 Board Assembly Unit 308 Tegal 99-299-001RW Rev.F Industrial/Laboratory MCR-1 Board Assembly Unit 309 Tegal 99-318-001/B Industrial/Laboratory CSI-1 PCB Board Assembly 310 Tegal 99-339-001 PMC CPU Transition Board Plug-In Module Assembly 311 Tegal 99-340-001/A PMC Serial Transition Board Plug-In Module Assembly 312 Tegal 99-341-001 Industrial/Laboratory Console Interface Board PCB Assembly 313 Tegal 99-343-001/A Industrial/Laboratory Master Control Console Board Assembly 314 Tegal 99-344-001/C Industrial/Laboratory System Cable Interface Board Assy 315 Tegal 99-360-001 Processor Board VME PCB Card AOB-1 98-360-001 Used 316 Tegal 99-385-001 DC/DC Converter Board PCB Rev. 4 6500 HRe Dual Frequency 317 Tegal 99-385-001 DC/DC Converter Board PCB Rev. A 6500 HRe Dual Frequency 318 Tegal 99-395-002 CIP-2 CTC Board PCB Card 98-395-001 319 Tegal 99-80267-01 PCB Shuttle Interface 320 Tegal 9XX PCB TMC-3 TEMP MONITOR CONTROL, P/N 99-138-003, NOS 321 Tegal 9XX PCB TMC-4 TEMP MONITOR CONTROL, P/N 99-138-004, NOS 322 Tegal 9XX PCB, 99-165-003 REV.J, NOS 323 Tegal 9XX PCB, 99-207-003 REV.2 MBE-3 324 Tegal 9XX PCB, 99-207-004 REV.C  MBE-4 325 Tegal 9XX PLASMA ETCHER INTERFACE PCB, P/N 98-223-002 REV A, NOS 326 Tegal 9XX PLASMA ETCHER PCB IMN-3 RF MATCH INTERFACE, 99-172-003, 98-172-003 327 Tegal 9XX PLASMA ETCHER PCB SIS-5 SENSOR INTERFACE P/N 99-200-005 REV B 328 Tegal 9XX PLASMA ETCHER SOLENOID VALVE ASSY SND/RCV 31-173-001 329 TEGAL AC MODULE 1028-00302 330 Tegal BES-530-8-PCB 8-Port/Channel Solenoid Valve Control Board 331 Tegal CC1147-00303 REAC Industrial/Laboratory Triode Split Assembly Unit 332 Tegal CC1326-00100 Chamber-Stripper For Parts As-Is 333 Tegal CC1327-00300 EZ Reactor Assembly HRE-PM1 6500 HRe 334 Tegal CD1039-00301 Industrial/Laboratory Endpoint Detector Assembly Unit 335 Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In 336 Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In 337 Tegal CD1039-00403 Wafer Etcher Plasma Chamber System Endpoint Detector Module 338 Tegal CD1043-00601 Industrial Wafer Etcher System Main Controller Module 339 Tegal CD1043-00601 Wafer Etcher Plasma Main Controller Module Chassis Frame 340 Tegal CD1043-00601RW Industrial/Lab Main Controller Assembly Module 341 TEGAL CD1298-02300 CON-MDL-VME-1HD CHASIS 342 Tegal CD1310-00104 Endpoint Module 343 Tegal CD1310-00300 Endpoint Module PM1 PM Tegal 6550 Etcher 344 Tegal CD1310-00300 Endpoint Module Tegal 6550 Etcher 345 Tegal CE00839 2 PINS WIDE 104ZA051 FEEDTHROUGH 346 Tegal CE00840 WDE 103 ZA053-600 347 Tegal CE00841 2 CTS FEMALE PLUG S 104 Z051-1 348 Tegal CE00842 4 CTS FEMALE PLUG S 103 Z053-1 349 Tegal CE00843 2 CTS MALE PLUG S 104 A051-130 350 Tegal CE00844 4 CTS MALE PLUG S 103 A053-130 351 Tegal CE00845 CABLE CLAMP E3 103.6/6.7 103.1 352 Tegal CE00845 CABLE CLAMP E3 104.3/6.7 B I 353 Tegal CE1028-00303 AC Module Wafer Etcher 1/3/5/10/15A Power Controller Module 354 Tegal CE1028-00303 Industrial AC Module Wafer Processing Plug-In Assembly 355 Tegal CE1028-00304 AC Module Wafer Etcher 1/2/5/15A Power Controller Module 356 Tegal CE1028-00304 Industrial AC Module Wafer Processing Plug-In Assembly 357 Tegal CE1028-00304 Industrial/Laboratory AC Module Assembly Unit 358 Tegal CE1028-00401RW Industrial/Lab AC Module Assembly Unit 359 Tegal CE1029-00201 DC Module Wafer Etcher Power Supply Chassis Enclosure Frame 360 Tegal CE1029-00201 DC Module Wafer Etcher System -15/5/15/24V Power Supply PSU 361 Tegal CE1029-00201 DC Module Wafer Etcher System -15/5/15/24V Power Supply Unit 362 Tegal CE1029-00201 Industrial/Laboratory DC Module Assembly Unit 363 Tegal CE1029-00201 Industrial/Laboratory DC Power Module Plug-In Unit 364 Tegal CE1029W00840 Industrial/Laboratory DC Power Module Plug-In Assembly 365 Tegal CE1093-0030 Industrial Motor Controller Control Module/Unit/Plug-In 366 Tegal CE1093-00303 Industrial Motor Controller Module Plug-In Unit 367 Tegal CE1093-00303 Industrial Plug-In Motor Controller Module Assembly 368 Tegal CE1153-00102 Industrial/Lab PSVTN Module Assy w/Watlow 804 Controller Unit 369 Tegal CE1153-00102 Watlow 804 Temperature Controller Passivation Module PARTS 370 Tegal CE1153-00102RW PSVTN Watlow 804 Temperature Controller Passivation Module 371 Tegal CE1323-10101 AC Module Distribution 372 Tegal CE1323-10101 AC Module Distribution Unit 6500 HRe SW HTR 208 Working Spare 373 Tegal CE1354-00200 DC Power Supply Module 374 Tegal CG1041-00402RW Industrial Pressure Controller Module Assembly 375 Tegal CG1148-00602 Wafer Chamber Gass Delivery Valve UFC-1020 BCI3 MFC Assembly 376 Tegal CG1150-00205RN Industrial 8-Channel RWK Gas Controller Plug-In Module Unit 377 Tegal CG1150-00206 Industrial 8-Channel Plug-In Gas Controller Module Unit 378 Tegal CG1150-0020G Industrial 8-Channel Gas Controller Module 379 Tegal CM04345 POTENTIOMETER MONOTURN 10K 1 TURN BIAS MATCH 380 Tegal CM05136 O-RING KIT VAT PENDULUM THROTTLE VALVE PUMPING CHAMBER 381 Tegal CM05346 POT, 10K, 10 TURN, SOURCE MATCH (PKG 2) 382 Tegal CM05473 BELT TIMING BROOKS MX600 116GRV LOAD LOCK 383 Tegal Compact Air Products Water Chuck, Vacuum Pump 384 Tegal Control Unit 385 Tegal Corp 39-452-002A ARM UPPER LH DOOR T915 386 TEGAL CORP 39-453-001 387 TEGAL CORP 39-453-002 388 Tegal Corp 39-659-001 Screw Stud Standoff Aluminum 38   T915 389 Tegal Corp 39-958-001 TEGAL PULLEY TENSION DOOR T915 390 TEGAL CORP 40-575-002-C   RING, CHUCK FRONTLINE – 6″ 391 TEGAL CORP 40-751-601-A   RING, 6″ WAFER CENTER STRIPPER 392 Tegal Corp 42-401-002 O-Ring, 235 V 393 Tegal Corp 42-402-001 Bracket Slide Front LH  T915 394 Tegal Corp 42-402-002 Bracket Slide Front RH T915 395 Tegal Corp 57-017-001 TEGAL PULLEY IDLER (BIG) DOOR T915 396 Tegal Corp 80-095-146 Transformer 220/115-24V  AC Module T9156-P-1623420 397 Tegal Corp 81-105-222 Sensor, Control(Platinum)Temperature TEGAL T915 RES-ASHER 398 Tegal Corp 99-196-003RW PCB  ATI-3  AUTO TUNE  T915 399 Tegal Corp 99-206-001 PCB AGCP-1 TEGAL 915 400 Tegal CP1037 CRT Program Terminal 13″ Wafer Etcher System Display Monitor PARTS 401 Tegal CR1031-00305 Industrial 100kHz Matching Network Plug-In Module Unit 402 Tegal CR1031-00305RW Industrial 100kHz Matching Network Plug-In Module Unit 403 Tegal CR1031-00306 Industrial/Laboratory 100kHz Matching Network Assembly 404 Tegal CR1040-00205EX Industrial RF Controller Plug-In Module Unit 405 Tegal CR1040-00205RW RF Controller Wafer Etcher Signal Generator Module PARTS 406 Tegal CR1087-20101RW RWK-RF Generator CR1087-20101RW – RF Plasma Model# T-502S 407 Tegal CR1296-00100 KHZ Controller CONT MTCH NTWK 500W 45 Tegal 6500 Etcher 408 Tegal CR1324-00100 RF Match Network Source Strip 409 Tegal CR1324-00400 RF Match Network Source Strip 6500 HRe 410 Tegal CR1325-00300 MHz Controller CONT MTCH NTWK STRIPPE 411 Tegal CR1330-10100 MHz Controller Cont 6550 RF Source Tegal 6550 Etcher 412 Tegal CR1338-10102 RF Match MTCH NTWK 450KHZ-ESC T Tegal 6550 413 Tegal CR1338-10102 RF Match MTCH NTWK 450KHZ-ESC T Tegal 6550 414 Tegal CR1350-00100 Source Reactor Module Process Chamber Tegal 6550 Etcher 415 Tegal CR1350-00100 Source Reactor Module Process Chamber Tegal 6550 Etcher Tool 416 Tegal CV00110 O-RING 699 417 Tegal CV00133 O-RING 178 01250 418 Tegal CV00134 O-RING 200 21313 G2 T47501 FPM 419 Tegal CV00136 O-RING 300 41145 COOLANT LOWER COOLING PLATE OUTER SOURCE 420 Tegal CV00137 O-RING 300 38500 COOLANT LOWER COOLING PLATE OUTER SOURCE 421 Tegal CV00325 O-RING 200 23100 COOLANT LOWER COOLING PLATE INNER SOURCE 422 Tegal CV00476 O-RING 0.138 X 0.609 423 Tegal CV00477 O-RING 0.139 X 0.734 CHEMRAZ 424 Tegal CV00481 O-RING 0.210 X 1.1 425 Tegal CV00482 O-RING CHEMRAZ 366C639 7.225 INCH X 0.210 INCH SC639 426 Tegal CV00507 O-RING 533 427 Tegal CV00508 O-RING 270 428 Tegal CV00527 O-RING TOR 240 00660 HE FEED ESCP SH 429 Tegal CV00528 O-RING 200 00570 HE FEED ESCP SH 430 Tegal CV00553 O-RING KIT VAT VALVE PROCESS PUMPING 431 Tegal CW 1047-00302 Industrial Electrostatic Wafer Chuck Assembly Unit 432 Tegal CW 1047-01101RW Industrial Wafer Chuck Assembly W/ 2x SMC NAQ2000 433 Tegal CW1033-00301 Industrial Wafer Elevator Assembly w/Stepping Motor 434 Tegal CW1033-00302 Industrial Wafer Elevator Assembly w/Stepping Motor 435 Tegal CW1033-00303 Wafer Elevator Library Selector Transfer Handling Assembly 436 Tegal CW1033-00303 Wafer Elevator Library Selector Transfer Handling Assembly 437 Tegal CW1038-00402 Industrial Spatula Drive Belt Assembly w/Stepping Motor 438 Tegal CW1038-00402RW Industrial/Laboratory Spatula Drive Assembly 439 Tegal CW1048-00502 Industrial Wafer Shelf Lift Assembly Machine Indexer Module 440 Tegal CW1048-00502 Industrial/Lab Pneumatic Indexer Module Assembly Unit 441 Tegal CW1048-00502 Industrial/Laboratory Indexer Pneumatic Assembly 442 Tegal CW1048-00502 Industrial/Laboratory Indexer Pneumatic Assembly 443 Tegal CW1048-00502 Wafer Chamber Shelf Lift Assembly Machine Indexer Module 444 Tegal CW1078-W00304RW Spatula Drive, 99-200-003 PCB Board 445 Tegal CW1299-20103 VCE Left Generic Load Lock Chamber Tegal 6550 Etcher 446 Tegal CW-1302 00500 Wafer Aligner Tegal 6550 Etcher 447 TEGAL DEIONIZED WATER HEATER CONTROLLER CE132100201 448 Tegal elevator frame assembly 449 TEGAL ENDPOINT MODULE, STRIPP, 99-390-004 CD1310-00202 450 TEGAL EPROM 400k MEMORY PCB,  PN 99-095-320 451 Tegal FLIP 03601-22-040 Alphanumeric Fluorescent Display 452 TEGAL Front Robot Loader interface 453 Tegal Heater Controller Tegal 6550 Etcher *working 454 Tegal Industrial Computer Source 7410-14H Control Unit CD1100-00302 4U Rack 455 Tegal Industrial Lab REAC Heated Upper Electrode Chamber Assembly Plate Unit 456 Tegal Industrial Lab Upper Body Chamber Ring Unit w/Viewing Side Ports PARTS 457 Tegal Industrial Optical Fiber Laser Head System I/O RF Driver Amplifier Module 458 Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 12.5″ Diameter 459 Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 13.5″ Diameter 460 Tegal Industrial REAC Heated Upper Electrode Chamber Assembly Plate CC1230-00100 461 Tegal INS-1 Wafer Etcher System 15-Pin Connector Sensor Component Board PCB 462 Tegal M3 X 16MM SCREW BUTON HEAD STAINLESS STEEL CLS. .3C16BHCS 463 Tegal Model 421 Manual PCB 99-011-001 464 Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot 465 Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot, 466 Tegal Model 901e / 903e Plasma Etcher SHUTTLE REBUILD KIT, 80-202-034, NOS 467 Tegal Model 903e Plasma Etcher FRONT PANEL INTERFACE PCB, 99-125-008, NOS 468 Tegal Model 903e Plasma Etcher GAS INTERFACE PCB ICG5 99-126-005 REV M 469 Tegal MX01136 PHYTRONIC ASSEMBLY ESCP SH 470 Tegal MyDax 2H14A Temperature Controller Instruction Manual 471 Tegal P/N 31-165-006 Stepping Motor, Carrier 472 TEGAL PCB ASSY (PARTS) 98-391-004 473 TEGAL PCB ASSY 31-398-002 474 TEGAL PCB ASSY 98-391-004 475 TEGAL PCB ASSY 99-406-001 476 TEGAL PCB ASSY 99-416-001 477 Tegal PEP-250-Te High Voltage Power AC Plasma Source Generator 100Kz RF Supply 478 Tegal PEP-250-Te Industrial/Laboratory AC Plasma Source Assembly 3157508-000A 479 TEGAL PLASMA 903 480 TEGAL PLASMA ETCHER 9XX 98-247-002, TSI. REV B 481 TEGAL PLASMA ETCHER 9XX GAS INTERFACE PCB, ICG-6, 99-126-006 REV F 482 Tegal PlasmaLine 200 Plasma Barrel Etcher –  Power Supply 483 Tegal Plasmaline 415 Plasma Chamber w/Varian L6267-301 NW40 Vacuum Valve 484 TEGAL PLASMALINE MODEL 421 WITH SPARE PARTS 485 TEGAL PLASMOD w/ MARCH GCM 100 PLASMA ASHER CLEANER ETCHER 486 Tegal PM3 Over Temp PM4 Level Sense Tegal 6550 Etcher 487 Tegal Quartz PIN P/N 40-297-001-E, NEW 488 Tegal RF Delivery 489 Tegal RF Interface PCB # 99-173-008 490 TEGAL RF SIGNAL GENENRATOR SUPPLY T-1000E 491 Tegal SE 1496A A/D Plug-In PCB Circuit Board Assembly Unit 492 Tegal SE 2059 AX CPU Plug-In PCB Circuit Board Assembly Unit 493 Tegal source reactor ICP CR1350-00300 with Tegal MHZ controller CR1325-00400 494 Tegal SPI-80-095-057 Probe Temperature SST 495 Tegal T-1000E Comdel T1000E/DCX Wafer RF Signal Generator DC Power Supply Module 496 Tegal T-1000E Comdel T1000E/RFG 13.56MHz RF Signal High Voltage Power Supply 497 Tegal T-1000E Industrial 40VDC DC Power Supply Plug-In Module Unit Assembly #2 498 Tegal TG00461 MONOBLOCK CENETRING RING CERAMIC PART 499 Tegal TR01785 PIPE ALUMINA INTEGRATED CIRCUIT SUPPORT ICS-2471883 500 Tegal TR05113 CONNECTOR HELIUM ESCP SH (PKG 2) 501 Tegal Type 41-137-001 Flag Chuck For Tegal Etcher 502 Tegal Type 80-202-186 Timing Belt (Pack Of 4) 503 Tegal Vacuum Cassette Elevator Loadlock VCE, 100/150MM, Left CW1299-10102 504 Tegal Wafer Elevator Vexta Motorized Linear Transfer Selector Library Handler 505 Tegal Wafer Lift Quartz Tip ANOD PIN, 49-042-002, 6 ea. 506 Tegal Wafer Transfer System Motorized Linear Selector Handler Vexta C4412 PARTS 507 TEGAL XJET-11503 TCU Elbow Fitting, 416192 508 Tegal XJET-14004-2 HGST Carrier 6500 Centring Ring Assembly 509 Tegal/Bay Pneumatic BES-530-8-PCB 8-Port/Channel Solenoid Valve Control Board 510 Tegal/Comdel T1000E/RF Industrial/Laboratory 13.56MHz RF Power Supply Unit 511 TEGAL/DDI SHUTTLE INTERFACE CIRCUIT BOARD 00094072, 98-287-002 REV. A DVO 450-B 512 TEGAL1513e MOTOR CONTROLLER ITEM CE 1093 513 Thermo Couple (TC) TEGAL 80-700-xx JES-CE 514 Unit/Tegal CHF3 80SCCM — UFC-1000 515 Vacuum valve, KF-40. Tegal P/N 516 VAT 14046-PE44-1016 HV High Vacuum Gate Valve Tegal 6500 HRe 517 Veriflo NPR400Z (TEGAL) High Pressure Regulator w/ Vacuum Torr Gauge 518 Xycom MVME-490/1 Circuit Board Tegal 6550 Etcher Tegal Spare Parts in stock for Tegal 901e , Tegal 903e , Tegal 901 , Tegal 903 , Tegal 981e , Tegal 983e , Tegal 700 , Tegal 701 , Tegal 703 , Tegal 801 , Tegal 803 , Tegal 421 , Tegal 415 , Tegal 965 , Tegal 915 ,Tegal 1500e , Tegal 1501e , Tegal 1503e , Tegal 1600 , Tegal 1601e , Tegal 1611 , Tegal 1612 , Tegal 1603e , Tegal 6000 , Tegal 6500 , Tegal 6510 . You can use “Ctrl” ”F” to search Part No. at this page easily. 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