Description 2006 OXFORD Plasmalab 100 RIE (FL) Reactive Ion Etcher Location: Nanjing, Jiangsu, China OXFORD Plasmalab 100 RIE (FL) For Sale Model Year : 2006 Quantity : 1 SN: 94-417795 Condition : Refurbished with OEM specifications ,crating, warranty, installation if necessary. Customer is responsible for chiller, pump and facility. Lead time: 12-16 weeks after payment. Availability : Subject to prior sale without notice. Configuration: Supports wafer sizes up to 300mm (330mm Platen) RIE set up for SiO2 Etch RF Generator : Advanced Energy RFX 600A ; 600W, 13.56MHz, Chamber Turbo Pump : Alcatel ATH 400M w/ ACT 600M controller Blue color PLC type Water cooled electrode 10C-80C Gas pod with 6 lines including following MFCs: Ar – 100sccm N2 – 200sccm CHF3 – 200sccm NF3 – 200sccm N2O – 200sccm Windows PC , user friendly interface Lauda WK 1200 Chiller was utilized by previous user. Not included. This tool was removed from production October 2014. Please contact us for more information on the product Please contact us for more information on the product: Your Name*: Your Email: Your Message: Captchac Code Submit: [dynamichidden dynamichidden-813 "CF7_URL"] Δ ID-OEM-Module-1 MSP-175K-195K Share the post "OXFORD 100 RIE" FacebookXShare…
