Description Surface Technology Systems STS Multiplex ICP Plasma Etcher SN:05943 System Type:Multiplex ICP Wafer Size: 4 inch. Can be upgraded for 5″,6″,8″ at refurbished condition. Chuck: E-chuck STS Main Etch chamber(72” L x 24” W x 48” H): ASE Type of loadlock:Single Wafer Loadlock RF Power Chart(32” L x 24” W x 40” H): ENI ACG-3 and ENI ACG-10B Low electrode Chiller ( 32” L x 24” W x 32” H): Neslab CFT-75 Electronics Rack Location:Standard layout proposed Pumps and pumping lines: leybold Turbo Pump Chamber Backing Pump:N/A Loadlock Pump:N/A Computer and monitor STS remote gas cabinet (32” L x 13” W x 60” H), Air cannister (12” L x 12” W x 24” H) & accessories. 5 gas lines with 4 of MFCs including Cl2 at refurbished condition. ********** Used. Great Condition. Valid : It is only for end users and is subject to prior sale without notice. Appreciate your time! Condition: We sell it at AS IS or complete, working, functional test at extra cost. Photos: Please contact us. Info on the system from the owner for your reference. Please contact us for more information on the product: Your Name*: Your Email: Your Message: Captchac Code Submit: [dynamichidden dynamichidden-813 "CF7_URL"] Δ OEM-24-1-MSP-125000 Share the post "STS ICP Multiplex" FacebookXShare…
